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Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

However, there is no problem in terms of contact output, when an output signal exceeds 1 mA or more. 20D-A90V Data OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 5 Series SZ3000 DIN rail dimension table/weight table D-sub connector (25 pins)/cable assembly VZ1000-11-11 VVZS3000-21A~ 3 Refer to the L dimension table Enter a number from the DIN rail dimension table below in the .

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

Loosen the cap and insert the power cable from the power cable access. 6. Connect the communication cables with P1 and P2. P1 (D-sub 25P female) Cap P2 (D-sub 9P female) P3 (D-sub 9P male) Not used.

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RO printing RO 8150SZ Printed in Japan. D-DN

Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

s Series Variations $ types provided I Four mounting f}-h fit Fi)s f4F-{X.}Eptu, {ttsfrd d 'd\ c{e zad I Piping is possible from two directions Slide beadng Ball bushing 1 2 1 6 20 25 32I 40 .

Proper auto switch mounting position (mm) Auto switch mounting height (mm) D-Z7 D-Y59 D-Y7P D-Y7W D-Y7BAL D-Z7 D-Y59 D-Y7P D-Y7BAL D-Y7W Auto switch model Auto switch model D-A54 D-A59W D-J51 D-F59F D-A54 D-A59W D-J51 D-F59F Bore size (mm) A 40 50 63 Bore size (mm) Hs 40 50 63 B 3.5 3.5 6 Ht 30 34 41 A B 0 0 2.5 A B 4 4 6.5 A B 7 6.5 12.5 Hs Ht 38.5 42 46.5 Hs Ht 38 42 47 1.5 1.5 5 30 34

2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 6 8.4 9.3 11.6 9.3 11.6 12.8 15.2 13.2 15.2 18.5 20.9 18.5 21.7 12.7 3.3 5.5 9.1 11