Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1 = m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic
I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable
I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable
High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water)
Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water)
Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water)
Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -
Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -
Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -
The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type). Energy saving is substantially increased by exchanging cooling water and heat directly. The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly
The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type). Energy saving is substantially increased by exchanging cooling water and heat directly. The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly
The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type). Energy saving is substantially increased by exchanging cooling water and heat directly. The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly
Cooling Capacity: 030 (30 kW), Type: Fluorinated Fluid, Pump Inverter Control: S (Pump Inverter Type)
Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type)
Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol)