LX

40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer

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K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

CNA

K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96

CNA

Bore size With rod boot/cushion 40 40 mm One side J Nylon tarpaulin Built-in Magnet Cylinder Model 50 rod boot 50 mm K Heat resistant tarpaulin In the case of built-in magnet without auto switch, the symbol for auto switch is Nil.

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

LJ1H

B A C D 39 40 Standard Motor 200W Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 20mm/10mm lead Vertical Mount How to Order Stroke LJ1H303 PA 1 K F 2 Cable entry direction Top entry Cable length Cable entry direction Power supply voltage Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial

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M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

CRQ2

10, 15, 20, 30, 40 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com K 20, 30, 40 CRA1 10, 15, 20, 30, 40 CRQ2 20, 30, 40 MSQ XA38 K 10, 15, 20, 30, 40 K J XA45 K K MRQ DCombination Chart of Made to Order 20Chart 4.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Mechanical Valves Series NVM, NVFM, NVZNI

. 90' '75 PSIG (5 Kgl/cmz) A B c D E F G H J K 3.70 (94) 3.01 '76.5)0.96 '24.5) 0.69 17.5) 0.06 (1.5) 0.12 (3) 1.57 (40) 0.96 124.5) 't.20 f30.51 o.24 (6) Millimeters in Parentheses A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T

IIIIIII

90' '75 PSIG (5 Kgl/cmz) A B c D E F G H J K 3.70 (94) 3.01 '76.5)0.96 '24.5) 0.69 17.5) 0.06 (1.5) 0.12 (3) 1.57 (40) 0.96 124.5) 't.20 f30.51 o.24 (6) Millimeters in Parentheses A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

2/3 Port Valve

: D Conduit terminal: T VX VNl VQ Grommet Conduit DIN connector Conduit terminal Electrical entry P Port size Rc(PT) A B C D E Model Energized open F H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106

XM, XY

Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C XMA XYA Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right flange surface Indicator

CM2

10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard Type Double Acting, Double Rod Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch Solid state switch D-H7/H7W/H7NF

ISO Standard Hydraulic Cylinder

2 (n 4) 2 D-M9/M9W 20 + 40 85 + 40 95 + 40 100 + 40 105 + 40 115 + 40 "n" pcs.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

+20 +15.5 50 +40 +25 +60.5 13-11-109 14 Series ZPT ZPT F 10-0-A14 (With buffer/One-touch fitting) 20 25 32 J K ZPT F 10-0-A14 (With buffer/One-touch fitting) 40 50 J K Applicable tubing O.D.Q Applicable tubing O.D.Q Hexagon width across flats P Rc 1/8 Hexagon width across flats P Rc 1/8 M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C K K 5 D C J J

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

Rotary Actuator

V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.