VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet type is available only w/ surge voltage suppressor, not w/ indicator light.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26

Lightweight and Compact

Contents Applicable model HRS-EP022 NPT thread conversion fitting set HRS090-W-20/40 HRS-EP023 G thread conversion fitting set Part no.

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

Compact Cylinder with Air Cushion and Lock Series RLQ

YA 03 YA-03 YA-05 18 20 6.8 9 16 20 6 8 42 50 6.5 6.5 10 12 Applicable air cylinder bore Bore size (mm) 32, 40 50, 63 03 05 32, 40 50, 63 U V W Mass (g) Part No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 30.5 26 36 9 10 40 32 36 47 108 Union: LQ2U Metric sizes Applicable tubing O.D. Model L M N W H E W 12 19 10 12 6 8 10 4 6 LQ2U22 LQ2U21 19 18 19.9 16 55 1/4 (M) LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 22 24 26.2 24 H 77 64 (E) (E) L 28 30 33.1 30 21 Class 2, 3 88 75 32 36 40 36 26 86 (M) N Inch sizes Applicable tubing O.D.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

VCC

Cleaning valve: 5 pcs. + Gate valve: 1 pc. 40 40 pcs. (colors) Note 2) Note 1) Two valves can be installed per manifold block. Total valve number must be an even number. Note 2) Maximum valve number is forty (40) valves (colors) by total of w + e + t. Note 3) When Without gate valve is selected, use 2 port valve of w as a cleaning valve. 2. How to Order Valve 3.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Hydraulic Filters

, Emulsion CW-5H-W Phosphoric ester CW-5H-V Petroleum CW-6H PAT.

2–4

35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch

Air Slide Table

Front matter 1 Air Slide Table/Reversible Type Series MXQR Fig. (1) Load Weight: W (kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (3) Workpiece Mounting Coefficient: K Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L1 A1 K = 1 L3 A5 L2 A3 End plate mounting Mp Mr W My W W W L3 A6 W L1 A2

HRL

W: 13 [kW] w Derive the heat generation amount from the power supply output.

Thermo-con

Note) Except HEC006, 012 RoHS How to Order 003 B HEC W 5 140 W, 320 W Cooling capacity 001 003 140 W Option 320 W Nil F N L None Radiating method With flow switch W Water-cooled NPT thread With level switch 5 100 to 240 VAC Power supply The option should be specified when ordering.