Sine Rodless Cylinder Series REA

Series REAL Size: 10, 15, 20, 25, 32, 40 To ensure a permanent path. When smoother operation is required, even with an eccentric load. Stable operation is possible even with an eccentric load, through the use of a ball bushing. Series REAH Size: 10, 15, 20, 25, 32 The use of a linear guide makes possible a large load, large moment and high precision.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Model ARP20(K) ARP30(K) ARP40(K) ARX 0.2 MPa Comparison under the same condition of P2 = 0.3 MPa Setting Port size AMR 0.4 MPa 0.6 MPa ARM Repeatability: Within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Model ARP20(K) ARP30(K) ARP40(K) ARX 0.2 MPa Comparison under the same condition of P2 = 0.3 MPa Setting Port size AMR 0.4 MPa 0.6 MPa ARM Repeatability: Within 1% F.S.

Modular Type Regulator Series AR

Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size

Soft Start-up Valve

Install an air filter. Install an air filter upstream near the valve. Select an air filter with a filtration size of 5 m or smaller. 2. Take measures to ensure air quality, such as by installing an aftercooler, air dryer, or water separator. Compressed air that contains a large amount of drainage can cause a malfunction of pneumatic equipment such as valves.

PSE550/300

mADC 5 20 Analog output [mA] Analog output [V] ZSE ISE 1 4 PSE 0 2 0 2 Differential pressure [kPa] Differential pressure [kPa] Z I SE3 Internal Circuit PS Z I SE1 2 PSE550 Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE550-28 Current output type 4 to 20 mA Allowable load impedance 500 or less (at 24 VDC) 100 or less (at 12 VDC) Courtesy of Steven Engineering, Inc.-230 Ryan

VXP21/22/23

LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA VXP2130: Option C, K, Q, S only.

5 Port Solenoid Valve Series SQ1000/2000

When ordering mixed wiring, add the option symbol "-K". Note 1) In case of two or more options, enter in alphabetical order. Example: D12BS Note 2) Indicate DIN rail length as D. ( indicates stations) Example: D08 In this case, an eight station DIN rail will be provided regardless of the number of manifold stations.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Cooling Capacity: 10.5 kW, Thread: Rc, Option: -

Cooling Capacity: 10.5 kW, Thread: G, w/Rc-G Conversion Fitting, Option: -

Cooling Capacity: 11.5kW, Thread: Rc, Option: -

Cooling Capacity: 11.5kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: -

Cooling Capacity: 11.5kW, Thread: G, w/Rc-G Conversion Fitting, Option: -

Cooling Capacity: 100 (10.5 kW), Thread: Rc

Cooling Capacity: 100 (10.5 kW), Thread: F (G, w/Rc-G Conversion Fitting)

Cooling Capacity: 100 (11.5kW), Thread: Rc

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting)

Cooling Capacity: 100 (11.5kW), Thread: F (G, w/Rc-G Conversion Fitting)