Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

Environment

LEF How to Order LEJ LEL S2 25A-LEJS 40 500 A H LEM Series compatible with secondary batteries w e r q t y u i o !

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

HRX-OM-W002

Heating capacity [W] 600 600 Heating capacity [W] 40 40 32 32 25 25 400 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-12 Heating capacity (HRR012-A/W-20,HRR018-A/W-20) 9.5.3 HRR024-A/W-20,HRR030-A/W-20 Ambient temp. 800 800 or Ambient temp.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

CRQ2

shaft Reversed shaft W W W W 10, 15 20, 30, 40 10, 15 W W W W W W 10, 15, 20, 30, 40 10, 15, 20, 30, 40 10, 15 Stepped round shaft with double-sided chamfer W W 10, 15 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made to Order Chart 2.

HRX-OM-X037

HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-T2 CH1 . 9-15 9.4.8 HRL100/200/300-A-40-T2 CH2 . 9-15 9.4.9 HRL300-A-40-T3 CH1 . 9-16 9.4.10 HRL300-A-40-T3 CH2 . 9-16 9.4.11 HRL100-W-40 CH1 . 9-17 9.4.12 HRL200-W-40 CH1 . 9-17 9.4.13 HRL100/200-W-40 CH2 . 9-18 9.4.14 HRL100-W-40-T2 CH1 . 9-18 HRL

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

low wattage 2 W DC) M5 x 0.8 0 to 0.7 Series VK3000 can be used as 3 port valve, as a N.C. or N.O. type, by plugging either A or B cylinder Port.

2/3 Port Valve

For DC, W=V/A (Note) cos (Note) cos shows power factor. w Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. e Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Contents Series Bore size (mm) Kit no. 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W CBG1N50-PS-W CBG1N63-PS-W CBG1N80-PS-W CBG1N100-PS-W Order seal kit in accordance with the bore size. Order seal kit in accordance with the bore size.

Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

Table of Contents

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

C85

O Head side trunnion: U (40) 51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33

Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!

MB

Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 MM DA MM DA 30 MM MM 30 AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 30 30 MM L W DA MM W A L H AL A H A T T MM H 6-6-40 40 Series MB Simple Special Change of Trunnion Bracket Mounting Position -XC14 2 An air cylinder on which the position for mounting the trunnion bracket can be moved from the standard mounting position

Thermo-chiller/Rack Mount Type

Obtain this value, referring to Cooling Capacity Calculation on pages 39 and 40 before selecting a model. HRR024-A HRR030-A 61 Height 665 x Width 610 x Depth 820 HRR024-W HRR030-W 60 HRR050-A 91 Height 975 x Width 610 x Depth 820 HRR050-W 80 Height 800 x Width 610 x Depth 820 Handling Warning *1 For models with an option, the weight increases as shown below. 1.

HRX-OM-X071

capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types

Proposals for Energy Saving

Content 40 50 63 MGZ40R-PS MGZ50R-PS MGZ63R-PS A set of above nos. 29, 34, 35, 36, 37, 38, 39 and 40. Seal kits consist of a set of items 29 and 34 through 40, which can be ordered using the seal kit number for each bore size. 12 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Actuator Series MGF 40, 63, 100 Guide Table Compact type with reduced height.

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male