HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

SYJ3000/5000/7000

) M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): SYJ5220-L-M5 M plug connector (M): SYJ5220-M-M5 DIN terminal (D): SYJ5220-D-M5 M8 connector (WO): SYJ5220-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4

Mechanically Jointed Rodless Cylinders

-X416/X417 Holder Mounting Bracket q, w 4 Stroke adjustment range MY3 B Bore size 300 L X416 70 60 50 40 30 20 10 0 80 Combination symbol L unit H unit 20 to 30 10 to 20 0 to 10 MY316 MY320 Refer to the table below for applicable symbols.

SX

Direction P, R port A, B port specifications C8 (One-touch fitting for 8) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W =

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly 11 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 AXT625-3A-20 End plate (D) !

CNA

40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 MGG 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 X 1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 MGC 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 X 1.75 11 26 to 750 (mm) MGF Bore (mm) LD LH LS LT LX LY MM N P Q H S T V W X Y Z ZZ CY1 40

Compact

20 20 65 28 27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

CNA

40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 Bore size (mm) 40 50 63 80 100 LH LS LT LX LY MM N P Q H S T V W X Y

CNA

40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 Bore size (mm) 40 50 63 80 100 LD LH LS LT LX LY MM N P Q H S T V W

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

LEC-OM071xx

Example: Set 20 W (100 W 20%) for the 100-W external regenerative resistors with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

Refrigerated Air Dryers Series IDF/IDU

AFF37B-14 AM650-14 37 176.5 300 AMH650-14 AMD650-14 AME650-14 AMF650-14 A B AT55C-20 IDFB55E HAW75-20 AFF75 -20 AM850-20 55 264.7 450 AMH850-20 AMD850-20 AME850-20 AMF850-20 A B AT75C-20 IDFB75E AFF75 -20 AM850-20 HAW110-30 75 353.0 600 AMH850-20 AMD850-20 AME850-20 AMF850-20 For screw compressors (when an aftercooler is installed) Air compressor Local line Sub line Main line Note 2) Air

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Valve Single Unit

, COM (Type 45N) In common between +COM and COM. + COM 2 to 10 stations: W = 26n + 172 11 to 20 stations: W = 26n + 199 Internal wiring Manifold base weight W (g) n: Stations (D-sub connector) SX3000 2 to 10 stations: W = 54n + 227 11 to 20 stations: W = 54n + 264 Terminal block SX5000 Note) There is a limit to the number of stations available depending on the number of solenoids required