Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

C95Series

I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!l. 2 pes , ~~~ t~ _ ql _ ~fqe) -25 70 75 95 120 125 130 !i 1 pc. 10 0 DF!

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

VT307

)2 W DC/Energy-saving type VT/VO307W Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO307V, VT/VO307W) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector valve, etc. 307 01 5 D V T F SY SYJ Body type Option T Body ported 0 Manifold VK

XLAQ/XLDQ

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C None w, e, r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Sine Rodless Cylinder Series REBR Direct Mount Type

REBH25, REBHT25 25 9 REBH15 20 16 REBH25 Load weight W (kg) 25 REBH15 10 REBHT25 9 40 REBHT32 5 4 3 W 2 W 1 0.5 70 100 300 500600 Maximum speed U (mm/s) Moment M1, M3 M2 (Static moment/Dynamic moment ) Allowable moment 100 100 85 96 REBHT32 REBHT32 64 56 50 40 30 50 40 30 (Nm) REBHT25 REBH25 REBHT25 REBH25 Model REBH15 REBH25 REBHT25 REBHT32 M2 16 26 85 96 M3 10 28 56 64 M1 10 28

LX

switch operates. 58 (52) 28 36: T-slot pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 L-M6 C 4H9 Refer to Cross section C-C.

VCL

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable voltage fluctuation 10% of rated voltage VX3 Coil insulation type Class B Class H VXA VCL20: 6 W, VCL30: 8 W, VCL40: 11.5 W Power consumption DC VN VCL20: 22/19 VA VCL30: 36/30 VA VCL40: 45/37 VA (2) Inrush

SMC Electronic Switch Series Variations

0 Description Shield plate Switch ass'y Piston PT fittings Adjustment screw Pointer Spring Scale plate Miniseal Y type Magnet No. q w e r t y u i o !

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

ITV

circuit EXH w Exhaust solenoid valve q Air supply solenoid valve u Pressure sensor r Diaphragm EXH e Pilot chamber y Exhaust valve u Pressure sensor t Supply valve r Diaphragm e Pilot chamber EXH t Supply valve SUP SUP OUT OUT EXH ITV1000 ITV2000, 3000 Block diagram Supply pressure q Air supply solenoid valve Input signal Output pressure r Diaphragm i Control circuit Pilot valve w Exhaust

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

LX Series Compact Electric Actuators

Deflection quantjiyat the point inclicated with arrow in lhe extended state of slide lable when load is oiven to that Doint. ' l I [--, T ] Oeflection qqantiiy at the poinl F' in the rehacted stale oi slidelable when load |s given 10 the pont 'A' t t r rer ffi tdLr=150mm 60 + t' 3 ! ! 1 0 E : t 50 8 40 6 30 9 4 20 2 l 0 n E .1!

Check Valve Series AK 1

flow Female thread Male thread t r t r Free flow One-touch fitting Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !