Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

Compact Hydraulic Cylinder

4 t i w r !5 Rod end male thread CHQWB32 to CHQWB100 e o !0 y q !2 !1 !4 t w r !3 i !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Series VCS

R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

IDX-OM-M051

(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K

ZP

ZP R 16 K20 A10 06 UGN [Pad model no.] Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

44

KFG2 KFG2 MS KKA KP LQ MQR T IDK 335

1.63

x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 13 15 20 20 22 22 44.5 47 52 56 60.5 67.5 MGT 25, 50, 75, 100, 125, 150, 175, 200 Nil TN TF P Bore size (mm) PW Q R S T U V X YY YL Z NN OA OB OL 20 25 32 40 50 63 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 17 18 26 27 28.5 30 64 68 78 92 132 160 24 26 35 35 44 48 123 146 178 193 247 274 108 128 156 172 220 248 126 146 176 192 240 266 76 92 112 128 168 196 9

VQC

L and M) 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

Special Specifications:

Body size Option Specifications Thread type R IN-OUT reversal direction AM, AMG850 Applicable model Port size AM AMG 850 20 Accessory Symbol Description Nil No accessory B Bracket Thread type Option Port size Accessory Symbol Description Nil No accessory B Bracket D N.O. auto-drain J Drain guide 1/4B female thread R T IN-OUT reversal direction Element service indicator 14-20-58 Bowl

Heavy Duty Stopper Cylinder

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

Vacuum Pad

Adapter ZP3P-T (20 to 50) PTSF-(A5/AG1/A12/AG2/AG3) ZP3P-T (20 to 50) PTSF-(B5/B8) w T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS25(L/R)/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEKFS25(L/R)EB Lead 6: LEKFS25(L/R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEKFS25(L/R)EA 10 15 Lead 12: LEKFS25(L/R)EA 10 Lead 20: LEKFS25(L/R)EH 5 Lead 20: LEKFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEKFS32(L/R)/Ball Screw Drive Horizontal Vertical

ZR

Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

,,: ,.

Bmm Pim Htlins Hex Head: PLUG \T Souare Head: PLUG Hex Countersunk: PLUG 1,," 21 Bmm S.l.E.45'tlme Tube To Male Pioe: CONNECTOR 1la 1B 5t16-24 7t16 .91 .078 3/16 'v8 sl8-24 7t't6 .98 .125 3/16 114 3ta-24 9/16 1 . 1 7 .125 1t4 1te 7t16-20 7116 1.O4 .189 1t4 114 7t16-20 9/16 1.25 .189 1t4 3/8 7t16-2016 .189 1t4 1t2 7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20

Dedicated Controller

ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

COQ2BP

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

CXT

5 e r t q w @9 @4 MX @2 MTS CXTM Guide rod/bearing @8 MY CY @5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX CXTL Guide rod/bearing D@1 -X 20@6 Data !9 @7 !2 y !3 u o !8 !0 !7 !6 Component Parts Description Material Note No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and