M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly
Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !
Up to 300 20 26 10 12 8 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 25 26 12 20 10 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 32 32 14 20 10 76 100.5 52 22 21 24 8 11 4 70 8 11 90.5 16 Up to 300 40 H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 M20 x 1.5 M8 x 1.25 189 180 11.5 127 9 38 20 19.5 22 12 5 24 15 28 5 4 41 20 M26 x 1.5 M10
0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.
Construction XMA/Angle type XYA/In-line type Auto switch (Option) q Bonnet assembly (Maintenance part) (Includes w, t, y, u) Magnet (Option) Pilot port Bellows side exhaust u Bellows holder (Material: Stainless steel 304) e Exterior seal (Maintenance part) y Bellows (Material: Stainless steel 316L) Bellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part
8, and @0 from the chart above CXSJ10-PS 8-28-20 20 Series CXSJ Dual Rod Cylinder: Compact Type Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM15 CXSJL15 !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !9 !8 @2 @6 !4 !2 @4 @5 !5 t MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG CXSJM20 to 32 CXSJL20 to 32 CX @5 !6 i u !7 o !5 t r !9 !8 @2 r !9 !
8, and @0 from the chart above CXSJ10-PS 8-28-20 20 Series CXSJ Dual Rod Cylinder: Compact Type Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM15 CXSJL15 !9 !8 @2 @6 !4 !2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o MX MTS MY CY !3 y !1 e q !3 y !
x M10 x 1.5 23 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 40 48 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 12 17 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 20 25 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 3.5 63 199.5 0 25 (1B) 0 1 0 1 32 (1 1/4B) 106 120 80 56 100 120 60 435
P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Details 0V 24 V side of the control circuit power supply (24 VDC) which supplies the driver.
3 A A u !0 o q e !2 y i w r !1 Replaceable Kits List !2 !1 !0 o i u y t r e w Switch actuator q Contents Kit no.
40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 MGG 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 X 1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 MGC 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 X 1.75 11 26 to 750 (mm) MGF Bore (mm) LD LH LS LT LX LY MM N P Q H S T V W X Y Z ZZ CY1 40
) 8 8 . 0 ( 4 9 . 1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T
1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l
How to Order Vacuum Pump Unit ZQ1000 U 5 K1 L EA u i o G q w e r t y !0 !2 !1 q Body type U M For single unit For manifold w Solenoid valve combination (Refer to Table (1).) r Solenoid valve rated voltage (Refer to Table (1).) e Pilot valve (Refer to Table (1).)
POM Stainless steel Material Note No. y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !
This assembly does not include special cable assembly for a pressure switch with energy saving function. (6) Connector assembly ZK2-LV W K A Valve type: J Valve type: K, R Lead wire length Applicable valve type Nil 300 mm Valve type K, R W (With supply valve and release valve) 6 600 mm 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (7) One-touch fitting assembly (Purchasing
Maximum operating pressure Minimum operating pressure Response time 79.8 psi (0.55 MPa) 0 psi (0 MPa) ON: 3.5 ms OFF: 2 ms 1 W (42 mA) 1 W (42 mA) 79.8 psi (0.55 MPa) 14.5 psi (0.1 MPa) 5 ms or less 0.7 W (29 mA) Note 2) 14.5 psi (0.1 MPa) 14.5 psi (0.1 MPa) 5 ms or less 0.7 W (29 mA) Note 2) 79.8 psi (0.55 MPa) 14.5 psi (0.1 MPa) 5 ms or less 1 W (42 mA) 1 W (83 mA) 24 VDC 12 VDC Rated coil
e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !