CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

RSH/RS1H

Stopper screw Lever Lever holder Bumper A Bumper B y u i o !

RSH/RS1H

Stopper screw Lever Lever holder Bumper A Bumper B y u i o !

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

stations 20 Port size {4(A), 2(B) port} Note 1)Order DIN rail separately.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

between the attachments and the workpiece, select a model that can provide a gripping force of 10 to 20 times the workpiece weight, or more.

Miniature Guide Rod Cylinder Series MGJ

Load voltage Lead wire length (m) Applicable load Type Special function Electrical entry Indicator light Wiring (output) Direct mounting 0.5 (Nil) 3 (L) 5 (Z) DC 3-wire (NPN) F8N U U u Solid state switch IC circuit Relay PLC 5 V 12 V Grommet (Perpendicular) 3-wire (PNP) F8P Yes 24 V U U u F8B 2-wire 12 V U U u Lead wire length symbols: 0.5 m . Nil (Example) F8N 3 m .

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 m u im ax 0 M 7 M 1 in e i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u an m t ad en ju m st Friction fittings Note) The diagram shows the rotation angle with a reference position set

MHC2

model which will provide a gripping force 10 to 20 times the weight of the workpiece.

MHC2

model which will provide a gripping force 10 to 20 times the weight of the workpiece.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

2%4$2$4$5 @4 #0 Section A-A' 20A Data A' $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. Description Cam follower cap Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin No.

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

PF2D

0 u !0 !2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

NCRBIBwserbs

PO Range of rotation lor outsut shafl wilh single wrenchflat and piston for aulo swilch.-. e@ NCDRB10W10.1,5.20.3 How To Order NCRB1BW U J -r lDouble End Shaft a 9 Q t l | .Po s Location I _ --Side ports Basic Body Flange Mount Angle Adiustment Without (standard) Size Torque U With angle adiustment (mm)-(inlbs) 10 _ 1.0 15 2.65 20 6.08 30 15.62 I E-rop ports aSingleVaneType Rotation 90 90o

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

PO Range of rotation lor outsut shafl wilh single wrenchflat and piston for aulo swilch.-. e@ NCDRB10W10.1,5.20.30 How To Order 9 Q t l | .Po s Location I _ --Side ports NCRB1BW U J -r lDouble End Shaft a Basic Body Flange Mount Angle Adiustment Without (standard) Size Torque U With angle adiustment (mm)-(inlbs) 10 _ 1.0 15 2.65 20 6.08 30 15.62 I E-rop ports aSingleVaneType Rotation 90

Serial Transmission System Series EX250 Series EX500

Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Note 1) Double wiring specifications 16 02 16 stations 2 stations Supply/Exhaust block assembly specification Note 2) Specified layout (Up to 32 solenoids possible.) 20 20 stations Nil S R RS Internal pilot specification Internal pilot

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

ZCUK

W B D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B A W A B W A 10 16 20 25 32 0.5 7.5 2.5 7.5 16.5 3 12.5 16.5 1.5 (1) 0 8 1.5 8 20 4 16 20 2 (0.5) 2 10 0 10 24 6 20 24 4 (1.5) 3.5 11.5 1.5 11.5 26.5 7 22.5 26.5 5.5 (3) 4.5 12.5 2.5 12.5 27.5 8 23.5 27.5 6.5 (4) Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

stattons : l : 20 | 20 staitons Type /rc Nvv5z3-4o-@2g|5 Stations I asize of A, B port lils | 10.32 Nom.

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stattons : l : 20 | 20 staitons Type /rc Nvv5z3-4o-@2g|5 Stations I asize of A, B port lils | 10.32 Nom.