Table of Contents

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

REA/REB

CB CR A B C D F G GP GW H HA HC HR HS HT J x E Model REAR10 2 0.5 10.5 6.5 3.2 12 6.5 6 27 25.5 26 24 25 24 5 14 M4 x 0.7 x 6 REAR15 2 0.5 12 8 4.2 17 8 7 33 31.5 32 30 31 30 8.5 17 M5 x 0.8 x 7 Max.

Series VQ Base Mounted Metal Seal/Rubber Seal

L1 L2 L3 Manifold C kit SV5Q12V, #5 Valve 2 position single SV5Q12V, #7 2 position doubleSV5Q12V, #8 3 position SV5Q12V, #8 1.10-185 VQ0/1000 Kit(Serial Transmission Unit) S The serial transmission system minimizes wire mass and wire connection labor and promotes space savings.

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

JXCx-OMT0062

Return of the read numerical data 7 Acceleration 0 0 8 8 Deceleration 9 9 Pushing force A A Trigger LV (No used) B B Pushing speed C C Moving force D Data editing error receiving D Area 1 E Parameter anomaly detection E Area 2 F The abnormal station detection F In position 0 Start flag 1 F to 0 1 7 to 1 (No used) F to 8 Movement MOD Current position Numerical data 2 F to 0 2 F to 0 Numerical

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 2 2 2 2 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A B C D E A B C A B C D A B C A B C A 1 2 3 4 5 1 2 3 4 5 6 7 8 1 2 3 4 1 2 3 1 2 3 13.7 x 9 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 13.7 x 9 21.3 x 15.4 26.7 x 20.5 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 33.4 x

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Model Interface For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side SY3000-37-80A-5 SY3000-37-80A-2 SY3000-37-80A-7 SY3000-37-80A-4 SY3000-37-80A-5 SY3000-37-80A-2 SY3000-37-80A-7 SY3000-37-80A-4 SY3000-37-80A-9 SY3000-37-80A-7 SY3000-37-80A-7 SY3000-37-80A-3 SY3000-

Rotary Clamp Cylinders

A C D 4 x G through K R Q 2 x 4 x H counterbore depth Through-hole/Both Ends Tapped Common (Standard) (mm) Nil TN TF V A B C D G H I J Bore size O P U K M N 0.07 0.15 32 40 50 63 14 6 G1/8 NPT1/8 Rc1/8 16 4.5 17 14 12 5.5 34 M6 x 1.0 60 45 M10 x 1.5 9 depth 7 0.07 0.15 14 6 G1/8 NPT1/8 Rc1/8 16 5 17 14 12 5.5 40 M6 x 1.0 69 52 M10 x 1.5 9 depth 7 0.07 0.15 17 7 G1/4 NPT1/4 Rc1/4 20 7 22

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A :OFF :ON :OFF :ON Position number IN3 IN2 IN1 IN0 Position number OUT3 OUT2 OUT1 OUT0 1 (End side) 1 (End side) 2 (Motor side) 2 (Motor side) 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 (A) 10 (A) 11 (b) 11 (b) 12 (c) 12 (c) 13 (d) 13 (d) 14 (E) 14 (E) Origin (F) Origin (F) (3) The change of I/O output signal The change of I/O output signal he condition of controller at auto mode.

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

42

C kit (Plug lead type) 6.

CJ2

B C d H NTJ-010A 7 8.1 M4 x 0.7 3.2 8 9.2 M5 x 0.8 4 NTJ-015A Refer to page 6-3-11 for details of the mounting nut.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

7 !2 i !3 @7 !8 !9 !5 u o !4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

VFR

stations 7 stations 7 stations 7 stations M2.6 x 0.45 Max. 8 stations Max. 8 stations Max. 8 stations Max. 8 stations Except VFR5000 Except VFR5000 Note 1) Maximum number is 8 stations.

Table of Contents

7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

SYJ300/500/700

S and Z types 24VDC: 7% to +10% 12VDC: 4% to +10% T type 24VDC: 8% to +10% 12VDC: 6% to +10% 659 10-SYJ300 3 port / Pilot operated solenoid valve Flow characteristics / Weight C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv 12(PA) 23(AR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm 2) L/M plug connector M8 connector Grommet 10-SYJ312 10-SYJ322 10