Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

Safety Speed Control Valve (SSC Valve) Series ASS

bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

VQ4000

(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1 4/2 (P A/B) VQ5 2 position metal seal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 VQ4 50 VQZ 4/2 5/3 (A/B EA/EB) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port

DM

MS (4) Barb cassette B T A VMG C + Driver 1. Turn the clamp bolt (6) to the left with a screwdriver, loosen until the stopper (2) touches the case (3), and barb cassette (4) will be pulled out in the direction A. Then clamp portion B, consisting of barb (5) and case (3), will be freed. Next, insert or remove the tube. 2.

2-Color Display

kPa 100 kPa 100 kPa For positive pressure 0.100 to 1.000 MPa 0.1 MPa 0 1 MPa 1 0.6 4 2.4 B A C B A C Pressure Pressure Descriptions LCD Unit display Displays the current pressure, set mode, and error code.

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Soft Start-up Valve

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C

Sine Rodless Cylinder Series REA/REB

23 25 4 x M8 x 1.25 Effective thread depth 12 CY C 0.1 14.5 B S + Stroke 2 2 CX ZZ + Stroke MQ B Q x R S TC x R W X ZZ C D E(h8) I K NA L P TN Model Nil TF RHC REA50 REA63 Rc 1/4 G 1/4 NPT 1/4 0 86 32 53 30-0.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 Rc 1/4 G 1/4 NPT 1/4 0 100 38 66 72.2 26 122 69 32-0.039 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 RZQ Mounting Nuts

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Digital Flow Switch (Integrated display type)

Normal condition (NOR): Flow measurement reference condition 101.3 kPa, 0 C. -55No.PF-OMJ0006-J Piping port specifications Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry

Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

REC

181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55

PSxx-OMU0005CN

) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max

Digital Flow Switch (Integrated display type)

(no freezing or condensation) Standards CE/UKCA marked, UL specification One-touch fitting C4 (4)/C6 (6) C6 (6)/N7 (1/4) C8 (8)/N7 (1/4) Piping Piping 15 Screw fitting (Rc/NPT/G) 01 (Rc1/8)/N1 (NPT1/8)/F1 (G1/8) 02 (Rc1/4)/N2 (NPT1/4)/ F2 (G1/4) Port direction Straight, Rear -90No.PF-OMW0007-E Model PF2M701 PF2M702 PF2M705 PF2M710 PF2M725 PF2M750 PF2M711 PF2M721 Material fluid contact parts