EXxx-OMZ0016

To use 8-14 frequency channels, neighboring frequencies need to be separated by 2 MHz.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DIN rail length with D at the end.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

ITV

G PPA ITV203 0.005 to 0.5 MPa 14-8-14 1/4, 3/8 AL ITV205 0.005 to 0.9 MPa Series ITV3000 ITV301 0.005 to 0.1 MPa Controls air pressure steplessly in proportion to an electric signal. ITV303 1/4, 3/8, 1/2 0.005 to 0.5 MPa 14-8-14 ITV305 0.005 to 0.9 MPa Series ITV209 Controls vacuum pressure steplessly in proportion to an electric signal.

IDUS/IDFS

2: Air Flow Capacity (Series IDFS) Data D-1: Air Flow Capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E IDUS3E IDUS4E IDUS6E Model Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 14-18-2 3 The models IDF1E to 11E and IDU3E to 6E have been revised.

Magnetically Coupled Rodless Cylinder

8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

240

Mounting Position (Detection at Stroke End) and Its Mounting Height D-M9 D-M9W D-M9A D-A9 A 22 [24] (24.5) W B [ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

ZX

D: Unit for replacement Ex.) If an adsorption confirmation switch is replaced for a vacuum switch on ZX1071-K15LZ-PBC, indicate as ZSE2-0X-15C-D. In this case, mounting screws P3270148-49 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.)

MXH

D-M9 D-F9W MX MTS W ( ): Denotes the values of D-A93.

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

EXxx-OMN0037CN

5 -20 F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -25No.EX-OMN0037CN-A 1 24 V() 2 3 0 V() 4 0 V() 5 FE M12 (4 ) 1 24 V 2 D/A DC24 V 34 0 V 5 FE FE 1 k 600

HRX-OM-W060

(This wiring is an example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor mounting area dimensions Mitsubishi