VZS Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.
OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size
brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.
Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5
m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-9-6 7 Model Selection Series CLS Selection Graph Graph (5) Graph (2) 0.3 MPa ) P < 0.4 MPa 0.3 MPa ) P < 0.4 MPa 4000 4000 3000 3000 250 2000 2000 200 Load weight: m (kg) Load weight: m (kg) 180 CL 1000 1000 160 700 800 900 700 800 900 250 140 CL1 600 600 125 200 500 500 180 MLGC 400 400 160 300 300 140 CNG 125 200 200 MNB
) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (
Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
PF3W520 [ M P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm
P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E
220 Allowable end load F (N) MGT MGGL 100Stroke 1 1000st (Ball bushing bearing type) 900st Deflection Y (mm) 800st 700st 0.5 600st D500st 400st -X st: Stroke (mm) 200st 300st Individual -X 100st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Allowable end load F (N) 367 Series MGG Allowable Eccentric Load Slide Bearing: MGGM Stroke 3000 P = 0.5 MPa 2000 MGGM100l l MGGM801000
9 P. 11, 12 P. 17 P. 19 How to Order Specifications Parts Description Dimensions Series SY (IP67) Digital Unit Unit to input or output digital (switch) signals P. 9 P. 13, 14 P. 18 P. 20 How to Order Specifications Parts Description Dimensions P.27 Series SV (IP67) Analog Unit Manifold solenoid valves Unit to input or output analog (voltage/current) signals P. 10 P. 15, 16 P. 18
1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1
(Rc, NPT, G) Cylinder port 4 x J M MM BZ GB R TDe8 D EA TY E C B W FA AL C A K F M TT N N B S + Stroke H BY TX TZ ZZ + Stroke BW For 180, 200, 250 Z1 + l + 1/2 Stroke With rod boot BV BZ BG BE e 4 x MA Effective thread depth MB (for holding eyebolt) f l ZZ1 + l + Stroke h + l (mm) Stroke range (mm) Bore size (mm) A AL B BABB BC BV BW BY BZ BP C D E EA F FA GAGB H P N K KA M J MM GC BD BG
M3 Terminal screw 102.9 27.3 A A A A A 39.5 40 A B A B 69.1 6.2 Silencer (Air discharge port) Manual override Press and turn for the locking type. ( DIN rail holding screw ) (Built-in silencer specifications) 4(A) port side: Orange 2(B) port side: Green With option L2 5 (Rail mounting hole pitch: 12.5) L1 50.5 4 A 4 A 4 A 4 A 54.5 3/5 E 3/5 E 86.5 79 92.3 94.5 2 B 2 B 2 B 2 B 1 P 1 P F F
Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase