20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154 20 44.5 84 36 25 163 50 100 70 9 37 3 x 3/4 1/4 96 43 60 163 24 60.5 100 49 34 175 63 126 92 0.5 40 3 x 1 1/4 96 43 64.5 167.5 24 60.5 104 49 34 179.5 63 126 92 5 44.5 3 x 1 1/4 113 48 65.5 171.5 24 66.5 115 56 38 183.5 70.5 141 109 41.5 P Q R Model SGHA130-10 SGHA230-3015 SGHA230-7015 SGHA330-3020 SGHA330-7020 SGHA430-3025 SGHA430
Output indication mode [Output Ratio] Setting range : -100 to 100% Min. increment : 1% Indicated content: Thermo module output ratio (Ex.: -73%) Function: Indicates Thermo module output ratio with increment of 1%. + is not indicated but + means heating and means cooling. O u t p u t R a t i o M O D E < 7 3 % 11.Upper/Lower Temp.
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Body Zinc die-casted r u !
:1D SI unit BOOL RO P 60A0:21 Slot 0 BOOL RO P 60A0:22 Slot 1 BOOL RO P 60A0:23 Slot 2 BOOL RO P 60A0:24 Slot 3 BOOL RO P 60A0:25 Slot 4 BOOL RO P 60A0:26 Slot 5 BOOL RO P 60A0:27 Slot 6 BOOL RO P 60A0:28 Slot 7 BOOL RO P 60A0:29 Slot 8 BOOL RO P 60A0:2A Slot 9 BOOL RO P -76No.EX-OMO0027-A Module Output Data SI unit (EX600-SEC) Table.
center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No
Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance
10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions
m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 274 Rotary Table/Rack & Pinion Style Series MSQ Table Displacement due to Moment Load (Reference values) 100 Arm The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where
Flow Characteristics (Conditions: Inlet pressure 0.7 MPa 2 position solenoid valve mounting) SJ3000 P port regulation (PA, B) SJ2000 P port regulation (PA, B) 0.8 0.8 0.7 0.7 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 20 40 60 80 100 120 140 160 0 20 40 60 80 100 120 140 160 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pneumatic circuit
: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.
(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order
Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 1Ry 5mA Servo ON 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS N-OT
IRV10A P P P P IRV20A P P P P P P Symbol Output specifications Part no.
= 41 58.5 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) L2 L1 P = 41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 D side entry (LD) ( 261.5 with AMC810-14 installed) 216 with AMC610-10 installed D side U side D side U side 100 with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed
V MM NA P S RR TF TH TT TV TW TX TY TZ Z ZZ -X Up to 300 80 100 M22 x 1.5 M26 x 1.5 80 100 Rc1/4 Rc3/8 104 105 18 22 11 13.5 55 65 11 12 110 130 72 93 85 100 45 60 64 72 Up to 300 26 32 183 192 241.5 268.5 IY-G08 IY-G10 Technical Data Use a thin wrench when tightening the piston rod. Refer to the dimensions of the basic type for the female rod end type and the long male rod end type.
VZ1000-1A-2 Note Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6
(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.
Mounting position Base mounted type 150/ 30 Impact / Vibration resistance m/s2 Dust proof Protection structure Internal pilot Solenoid Specifications SYJ712 4 SYJ72 2 4 Grommet (G), (H), L type plug connector (L), M type plug connector (M) Electrical entry A A 24, 12, 6, 5, 3 Coil rated voltage V DC 100, 110, 200, 220 AC 50/60Hz P R P R 10% rated voltage Allowable voltage 0.5 (With light
Basic weight 0.40 kg (Foot style 20) Additional stroke weight 0.06 kg/50 ST Air cylinder stroke 100 ST Additional air cushion weight 0.02 kg 0.40 + 0.06 x 100/50 + 0.02 = 0.54 kg (Foot style 20, 100 stroke) 10-14-11 12 Series CG5-S Construction With rubber bumper 80, 100 80, 100 t e t q o i r y !