CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

10

D-X 893

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

air-filter-e

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

Air Preparation Equipment

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

Multi-channel Digital Sensor Monitor ( compatible)

D The setting time from when the input signal reaches the set value, to when the ON-OFF output actually begins working. Delay time setting can prevent the output from chattering. Delay time Shows how precisely the pressure can be displayed or set.

XL-OMV0002

1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

, 500 40 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 125 Intermediate strokes are available.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Flow Control Equipment

D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

73 psi [0.5 MPa] Peak clamping force position 112 [500] 90 [400] 0.3 MPa 44 psi [0.3 MPa] 67 [300] 45 [200] 22.5 [100] 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Shim thickness [mm] 9 CKZT -X2797 -X2798 Be sure to read this before handling the products.

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) Auto switch model D-A9 D-M9 D-M9W D-M9A D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G59F D-F5 D-J59 D-F5W D-J59W D-F59F D-F5NT Note 2) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44C D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A9V D-M9V D-M9WV D-M9AV Note 2) D-P4DW D-P3DW Hs Ht Hs Ht Hs Hw Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

NCQ2/CQ2

D-A7wH D-A80H D-F7w D-J79 D-A9wV D-A7w D-A80 D-A73C D-A80C D-F7wW D-J79W D-F7BAL D-F79F D-F7NTL D-M9wWV D-M9wAVL D-F7wWV D-F7BAVL D-M9wV D-F7wV D-J79C Number of auto switches D-A9w D-A79W D-P3DWw With 1 pc. 5 5 10 10 15 15 20 15 With 2 pcs. 5 10 10 15 15 20 20 15 The applicable auto switches for the CDQ2 R/ V (water resistant) are the D-M9 A(V)L type.

Compact Cylinder

Applicable Cylinder Series: CDQP2, CDQP2lll-lS/-lT (Axial piping) (mm) D-A7lH D-A80H D-F7l D-J79 D-F7lW D-J79W D-F7BAL D-F79F D-F7NTL U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 64.5 74.5 Auto switch model D-A9l D-A9lV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lAL D-M9lAVL D-F7lV D-F7lWV D-F7BAVL D-A7l D-A80 D-A73C D-A80C D-J79C D-A79W D-P4DWL Bore size U 26 29 31 34 38 41.5 47.5 54 64 74 U 23 26 28 31 35