Precautions 1

At this time, instead of removing the plate and the solenoid valve separately, remove them together, with the hexagon socket bolts remaining inserted. 700 25 600 32 Piston speed (mm/sec) e size 20 5 500 2 2 3 400 40 or B 300 0 Hexagon. socket head cap screw Plate 4 200 Solenoid valve Convex position of sub-plate gasket 100 0 1 2 3 4 5 6 7 8 Fully open Without throttle valve Opening of throttle

VQC

Refer to e.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

MXW

500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

MXW Series Long Stroke Slide Table

500 100 200 300 400 600 500 100 200 300 400 600 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 142 Long Stroke Slide Table MXW Series Construction / Parts List Packing List 5 3 4 6 17 18 15 2 1 21 10 16 19 8 7 9 20 12 13 11 14 Parts List Note Material No.

Fieldbus system EtherNet/IP compatible SI Unit

F) EX600-DX#D/E/F (5 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 EX600-DX#D: 05 (Hex) EX600-DX#E: 14 (Hex) EX600-DX#F: 16 (Hex) 1 0..7 Unit ID Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 3 Reserved 0 2 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6.

Air Slide Table Series MXW

500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 152 Series MXW Air Slide Table Option Specifications Stopper Bolt Assembly Stopper bolt assembly can be ready for the following manner.

5 Port Solenoid Valve, Series VQC

Refer to e.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.

125

t w t Port 3(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

Miniature Regulator Series ARJ210

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate

Smooth Cylinder

, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Kit No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CS1

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261