NCA1

2 4-NT WF G J TN Depth ND E XT SN + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A ZB + Stroke Bore size (in) MM KK NT TN WF XT Y LF P SN ZB A AA B BA C D DD E E/2 EA EE G J ND R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 3/4 2.02

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

SMC Electronic Switch Series Variations

0 Description Shield plate Switch ass'y Piston PT fittings Adjustment screw Pointer Spring Scale plate Miniseal Y type Magnet No. q w e r t y u i o !

0.4

Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.

NCQ8

J E H-thread M2 bolt circle M1 W I dia. D-rod dia.

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

42

: Double, 3-position/With light (For B side) E: Single, Double, 3-position/ Without light (A/B side common) V118-A B E V118-A B E 4 Pilot valve assembly 4 Pilot valve assembly Coil type Coil type Nil Standard (0.95 W) Y Low wattage type (0.4 W) Nil Standard (0.95 W) Y Low wattage type (0.4 W) 528 Construction VQ5000 Series Plug Lead Unit Metal seal type Rubber seal type e q w q w e SV SYJ

E-MY2_E_D

and E-MY2HT.

LEC-OM069xx

Posit io n e rr? ? or Posit io n e rr? ? or 3 La rg e friction Refere nc e sp ee d Refere nc e sp ee d Without friction compensation With friction compensation 5 5-62 5 Adjustments 5.8.3 Current Control Mode Selection Function This function reduces high-frequency noises while the servomotor is being stopped.

Mini Free Mount Cylinder

3 w e q !1 r y o e t !2 4 Built-in magnet Without magnet Single Acting, Spring Return u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male threaded Replacement Parts: Seal Kit Double Acting Component Parts Contents No. Description Note Material Kit no.

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

AW

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

SL5200

Ports 2 ports 3 ports 4 ports Code w q w q 2PW 3PW 4PW 2) Refer to gauge guide (P.94) for gauge specifications. 2PW 3PW Sample Order Number Port r e SL5502S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications SL5502mmA SL5502 SL5510 SL5506 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 30

Series VQ Metal Seal/Rubber Seal Body Ported

Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Water-cooledThermo-chiller

(75 mm) or less Plate Facility water inlet Rc3/4 (with plug) Circulating fluid outlet Rc3/4 (with plug) REMOTE START/STOP RUN Handle ALARM RESET SEL ENT Circulating fluid fill port Circulating fluid return port for DI filter Note) E S O L C SMC N E P O Circulating fluid level gauge Rc1/4 (with plug) Circulating fluid return port Rc3/4 (with plug) C Ventilation (expiration) Tank drain port

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

SFOD-OMT0010

Parameter is not registered (0-901) E < Details > An alarm is generated when the step data is executed without step data setting. Download the step data to the controller. Turn off the main control and motor control power supplies. Step data is not regestered (0-902) E < Details > System error occurred.

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65