Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5
Body mounting bolt tightening torques Tightening torque (Nm) 3.0 4.9 10 20 40 50 80 120 Bore size (mm) Mounting bolt size M5 M5 M6 M8 M10 M12 M14 M16 20 25 32 40 50 63 80 100 Magnetic body (steel plate, etc.) 283 CHKG Series Construction r !0 !1 q y !3 !5 o i !4 !2 u t e w 32 to 100 Without auto switch e 20 to 25 Parts List Replacement Parts/Seal kit Material Seal kit no.
Angle type M9N A 25 In-line type q w e r t y u w Flange type XMD q Flange size Size Symbol Type Applicable flange size XMD XYD 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) KF (NW) K (DN) CF 25 40 50 63 80 Nil D C XYD D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 Nil e Pilot port direction Rear flange surface XMD Rear flange surface XYD Symbol Pilot port direction Flange side Left flange surface
Stainless steel E 230 VAC 6 D K L N.C. C37 25A 1 25 F 24 VDC Stainless steel N.O.
2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.
Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.
55 25 G 1/2 18 M10 x 1.5 10 M20 x 1.5 22 42.9 17 138 4 17 10 51 320 118 89 32 91 Bore size [mm] e d f l h 1 to 50 901 to 1000 32 36 54 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 36 54 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225
B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32
54 68 25 40 80 100 Inlet air pressure (MPa) 0.7 0.7 Inlet air temperature (oC) 25 25 Inlet air saturation temperature (oC) 25 25 Ambient temperature (oC) 25 25 Dew point indicator purge air flow rate 1 L/min [ANR] {In the case of Inlet air pressure 0.7 MPa} 1 L/min [ANR] {In the case of Inlet air pressure 0.7 MPa} Regulator construction (Type V only) Relief type Relief type Port size (Nominal
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
25 5 M4 x 0.7 21.5 O P Q R thread 8 to 18 S 20, 25 F E Oh9 0.1 100.2 25 L 2 x M5 x 0.8 (Piping port) M8 x 1.25 Effective thread depth 11 12 U K 2 x 5.5 through 2 x 2 x 9 counterbore depth 7 S 3 5.5 L K C 2 x 3.3 depth 3 +0.15 +0.05 R + Clamp stroke 3 4 B Q + 2 x Clamp stroke A Both ends tapped: MKA M6 x 1.0 10 10 R + Clamp stroke (Basic) (mm) B A C E F K L Oh9 Q R S U Model MKB20 MKB25 0
thread depth 25 M22 x 1.5 3/4 228 8.5 to 13.5 328 30.5 32 10 22 13 78 100 M12 x 1.75 thread depth 25 M26 x 1.5 341 41 3/4 236 34 16 80 10 26 1206 High Power Cylinder Series RHC Dimensions: Axial Foot Style 20 to 40 GA 2 x Rc P H GB F K A F WH NN AL H2 MM H1 NE D LY 4 x LD LH LT NF E E JD N Width across flats KA 10 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) A AL D E
oF ~ e t h .e cJ!.. ~ F N ...IL DC _ KODB ZZ1 (+ Stroke TX TZ H S + Stroke M II + Stroke (mm) I w Stroke range (mm) Bore size (mm) K KA A M MM AL J D B DC D E F N G V 71 43 15 15 17 15 13 27 125 32 47 143 115 25 to 1000 M30xl.5 50 30.5 M1 4 >: 1.5 140 3Q to .
13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.
13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.
20 122 17 Low Profile Air Gripper Series MHF2 Dimensions MHF2-20D Scale: 50% 38 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 71 6 62 86 2-M6 x 1 thread depth 6 33 56 Finger closing port M5 x 0.8 Mounting thread E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31 31 Finger opening port M5 x 0.8 2-10 1.2 1.2 E-E +0.1 0 Close: 0 Open: 201 4-
size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston connector Electrical entry