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J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B [110] 81 35 Light (For TL, TZ) Max.12 31.3 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 NO NO PE PE [243] 237.6 239 228.5 213 31 31 130 130 52 52 41 41 105 105 [ ]: With indicator light (TL, TZ) 1312 Note) CE-compliant: D/DO only (Electrical entry) VP3145/3165/3185 Series Made to Order [Option] Please contact SMC

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).

1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

(mm) Connection thread KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 14.7 14.7 15 14.2 13.7 13 15 17 21 23 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 18 19 21.5 24 25.5 2.6 32 36 42 79 105 17 17 19 22 24 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 Applicable tubing 6.8 13.1 20.4 30.4 Straight Union: KCH Applicable tubing O.D.

ZB1-ZSF-A (ZSE10F) 14.5 to 14.5 psi (100 to 100 kPa) 15.2 to 15.2 psi (105 to 105 kPa) Model (Refer to the standard model number for the switch unit on page 9.)

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 99.5 99.5 99.5 Q R U 102 105 105 105 U VXF25B< VXF26B

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1999 D-SMC.L.A. P-77.5 (YG)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing June, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Reducer elbow KQ2L Male connector P.105 KQ2H Cross P.121 KQ2TW Use to change the tube direction of Onetouch fittings by 90 and connect tubing of reduced size. Use to pipe a female thread in the same direction. Most general model. P.109 Use to four-branch a line.

5 170 67 22.2 Controller 60 34 31.8 4 x 9.5 counterbore depth 5.4 5.5 through 48.7 19.5 Workpiece mounting center line FG terminal M3 15.5 37 7 5 87.3 (51.8) 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 7.1 (Max. 10.1) 17.5 6 198 + Stroke 8.5 Motor position TA Motor position TB 5.3 3 I/O cable Note) Slot for auto switch 5.5 2 x 4 x square nut M5 x 0.8 Power supply cable (2 wires) 105

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120

to 105 kPa 10 to 105 kPa Withstand pressure 500 kPa Minimum setting unit 0.1 kPa 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Current consumption 40 mA or less Switch output NPN or PNP open collector: 2 outputs (selectable) Maximum load current 80 mA Maximum applied voltage 28 V (with NPN output) Residual voltage 2 V or less (with

115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104 159 169 179 95 90 85 80 75 70 105 110 120 130 135 100 140 150 160 CXS D-X Individual -X 567 Series CXS Dimensions: 20, 25, 32 ZZ Stroke J SS K B M 1 D I Z L C 1 0.2 0.2 0.2 H A P G G 6.3 5 E F (Through-hole) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C

145 165 I 12 12 12 12 20 15 18 23 NN 2 2 2 2 3 3 4 5 H 39 39 48 58 52 44 44 G 18 18 19 19 21 36 17 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 MXQ16L10 MXQ16L20 MXQ16L30 MXQ16L40 MXQ16L50 MXQ16L75 MXQ16L-100 MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 112 Air Slide