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Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 99.5 99.5 99.5 Q R U 102 105 105 105 U VXF25B< VXF26B

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1999 D-SMC.L.A. P-77.5 (YG)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing June, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Reducer elbow KQ2L Male connector P.105 KQ2H Cross P.121 KQ2TW Use to change the tube direction of Onetouch fittings by 90 and connect tubing of reduced size. Use to pipe a female thread in the same direction. Most general model. P.109 Use to four-branch a line.

5 170 67 22.2 Controller 60 34 31.8 4 x 9.5 counterbore depth 5.4 5.5 through 48.7 19.5 Workpiece mounting center line FG terminal M3 15.5 37 7 5 87.3 (51.8) 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 7.1 (Max. 10.1) 17.5 6 198 + Stroke 8.5 Motor position TA Motor position TB 5.3 3 I/O cable Note) Slot for auto switch 5.5 2 x 4 x square nut M5 x 0.8 Power supply cable (2 wires) 105

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120

to 105 kPa 10 to 105 kPa Withstand pressure 500 kPa Minimum setting unit 0.1 kPa 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Current consumption 40 mA or less Switch output NPN or PNP open collector: 2 outputs (selectable) Maximum load current 80 mA Maximum applied voltage 28 V (with NPN output) Residual voltage 2 V or less (with

115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104 159 169 179 95 90 85 80 75 70 105 110 120 130 135 100 140 150 160 CXS D-X Individual -X 567 Series CXS Dimensions: 20, 25, 32 ZZ Stroke J SS K B M 1 D I Z L C 1 0.2 0.2 0.2 H A P G G 6.3 5 E F (Through-hole) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C

145 165 I 12 12 12 12 20 15 18 23 NN 2 2 2 2 3 3 4 5 H 39 39 48 58 52 44 44 G 18 18 19 19 21 36 17 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 MXQ16L10 MXQ16L20 MXQ16L30 MXQ16L40 MXQ16L50 MXQ16L75 MXQ16L-100 MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 112 Air Slide

1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35 14 7 7 4 1/4, 3/8, 1/2 220 147 48 110 38 72.5 75 50 40 40 18 9 9 4 Accessory/Optional specifications (2) (3) (3) (3) (3) (3) With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Upward facing handle Model H2 J K L B B B B B C ACG20 ACG30 ACG40 87 24 33 12 5.5 105

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

Specifications PF2A511--1 PF2A200/201 PF2A551--1 Model Applicable flow rate sensor PF2A510--1 PF2A550--1 PF2A521--1 0.5 to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Flow rate measurement range Note 1) 0.5 to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Set flow rate range Note 1) 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Minimum

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

149 74 m 105 m 149 m 1 1/4B, 1 1/2B, 2B 2 1/2B, 3B Length below flange neck (T dimension) M Micromesh Element Standard T dimension T dimension when shipped Symbol Length (mm) 310 380 450 520 590 385 485 585 685 560 650 750 850 Port size (Nominal size) Adjustment range (mm) Differential pressure indication (Max.

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 2 (Different surfaces, Same surface) 1 20 100 105 110 D-Y7BA n 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2

V MM NA P S RR TF TH TT TV TW TX TY TZ Z ZZ -X Up to 300 80 100 M22 x 1.5 M26 x 1.5 80 100 Rc1/4 Rc3/8 104 105 18 22 11 13.5 55 65 11 12 110 130 72 93 85 100 45 60 64 72 Up to 300 26 32 183 192 241.5 268.5 IY-G08 IY-G10 Technical Data Use a thin wrench when tightening the piston rod. Refer to the dimensions of the basic type for the female rod end type and the long male rod end type.

115 100 35 + 30 (n 2) (n = 2, 3, 4) 80 + 30 (n 2) (n = 2, 3, 4) 115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces same surface