Manifold Specifications Series VZ3000/Body Ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size
length of the return unit (mm) Unit construction Flow switch type Temp. sensor Flow range Port size A Symbol Flow adjustment valve Stop valve Nil 95 S 95 Nil P 139 1/2 Remote sensor/ W 139 (symbol 04) 5 to 40 L/min Integrated display type 3/4 (symbol 40) Nil 106 (symbol 06) S 106 Yes P 150 W 150 B: Total length of the supply unit (mm) Unit construction Flow range Port size B Symbol
Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting Minimum strokes are as follows based on the space required for mounting auto switches.
D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54
Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting (mm) 1in = 25.4mm Minimum strokes are as follows based on the space required for mounting auto switches.
Wn Weight mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88kg 65mm 0mm 5mm 111 Wb 4.35kg 150mm 0mm 42.5mm Y 210 Y Wc 0.795kg 150mm 111mm 42.5mm Wd 1.5kg 150mm 210mm 42.5mm n = a, b, c, d 3 Composite center of gravity calculation m3 = mn = 0.88 + 4.35 + 0.795 + 1.5 = 7.525kg 1 m3 X = x (mn x xn) 1 7.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.5 x 150) = 140.1mm 1 m3 Y = x (mn x yn) 1 7.525
VJ324M Release valve VJ114 B Manual override (Simply turn the locking type override.)
Manual override (Non-locking) Bracket B (Standard accessory) (Mounting hole) Bracket B (Standard accessory) (Mounting hole) Supply valve Release valve Release valve Supply valve N.O.
B Sets alarm which is selected for contact output 3. [-] is displayed when the setting of the output signal of contact output3 is not selected alarm signal. Contact output signal 3 ---(AL.01) selected alarm 2.4 Setting and checking HRS100/150 Series 2-4 HRX-OM-S010 Chapter 2 Contact input/output communication 2.4.2 Setting and checking Communication mode Setting and checking 1.
6 6.5 10.5 13.5 16.5 19.5 B 12.5 15.5 18.5 21.5 A 29 29.5 33 24 28.5 29 B 6.5 7 11 14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK220 MK225 MK232 MK240 MK250 MK263 Auto Switch Mounting Bracket Part No.
Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13
mm x 150 mm, capacitance: 20 pF) as defined in the U.S.
Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.
D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30
Auto switch a b d c Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper Mounting Position (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper Mounting Position (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-M9 type D-F9 W type 2 6 5 8 12 11 In order that
R25 19 18 R6 18 19 R25 19 R6 19 [mm] [mm] Model NAAMS code A B Weight [kg] CKZ-50A013 ACA221M 90.0 55.0 0.8 CKZ-50A014 ACA222M 120.0 85.0 0.9 CKZ-50A015 ACA223M 150.0 115.0 1.1 Model NAAMS code A Weight [kg] CKZ-50A007 ACA211M 90.0 0.7 CKZ-50A008 ACA212M 120.0 0.8 CKZ-50A009 ACA213M 150.0 1.0 50 mm offset: Machined 25 mm offset: Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through
25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13 17 17 17 19 19 19 22 24 24 27 Spare parts Rod end nut The basic type has one rod end nut attached, it is possible to order additional