ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400 500 600 700 Flow rate (l

CYV

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2

VQC

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

HRX-OM-W004

Refer to3.10.2 CRC(RTU). f )End 3.5 characters of silent interval indicates the end of a message. 3.9 Function codes Table 3.9-1 shows function codes to read or write register. Refer to "3.11 Explanation of function codes ".

Rodless Cylinder for Vacuum Series CYV ø15, ø32

A M2 = F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

A M2 = F x L M3 = F x L M1 = F x L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection

Electric Slide Table / High Precision Type 《 AC servo motor 》

Rubber back of the belt is softened and sticky. f. Crack on the back of the belt 4. Troubleshooting Alarms below are abstract of representative examples.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg MY2HT25 Horizontal impact: P = 0.5MPa MY2H25 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 H unit Impact speed mm/s Impact speed mm/s Impact speed mm/s 1000 1000 H unit L unit 500 400 300 500 400 300 L unit Air cushion Air cushion Caution 200 200 Do not use a shock absorber and air cushion together. 100 1 2 3 4 5 10 20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air

IP8001 Series

ExIP8001-010-EW F With feedback lever unit for stroke 50 to 140mm. 2: When 52ATEX type specify symbol M, 2, 5, blue cable grant is equipped for electric connection. W With body cover window.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Station L1 L2 3 96 68 6 153 125 8 191 163 10 229 201 20 419 391 2 77 49 4 115 87 5 134 106 7 172 144 9 210 182 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1.2-70 Series SYJ7000 Flat Cable Manifold SS5YJ7-21PStation 41.5 SY Manual override Depress and turn to operate and lock override.

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900 900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50

HRX-OM-Y098

(G thread)" or "N (NPT thread)" is selected, it becomes "G thread " or "NPT thread ". 2 When the piping screw type "F (G thread)" or "N (NPT thread)" is selected, a conversion joint is included.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Magnetically Coupled

Stroke Note 1) 50, 63: L 0 0.008 8-V Effective thread length Y H A B G H B G NN (R) NA Q N F I NA F N CC0.1 NCY3B50, 63 NCY3B6 to 15 (inch) Model Symbol L K J I H G F D A B NN C MM CC N NA P NCY3B6 NCY3B10 NCY3B15 NCY3B20 NCY3B25 NCY3B32 NCY3B40 NCY3B50 NCY3B63 1.38 1.50 2.24 2.60 2.76 3.15 3.62 4.50 5.00 0.19 0.19 0.37 0.31 0.38 0.51 0.56 1.00 1.00 0.16 0.18 0.24 0.24 0.31 0.31 0.39 0.47

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Angle Seat Valve

VXB215C F(H).