Vacuum Module Series ZX ZX1 V A K1 5 L Z System Release flow rate adjusting needle Manual override PV/V port size A B Ejector system External vacuum supply Refer to page 906 for the specifications of ZX1-VB.
300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead B Lead B 40 Work load: W [kg] Work load: W [kg] 20 30 Lead A Lead A 20 Lead H 10 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 30 60 Lead B Work load:
(UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11kWP1-P) P1 P2 (C) 200V CNP2P-D PC (13.2) 5 3 5 (2) (a) DO CN6ON/OFF (b) CN6 DC24V (c) CN6 SD DOCOM CN6 DOCOM SD 5.1.3 (1) (a) (b) (12.4) (c) (2) 5 4 5 5.2 5.2.1 (1) ON(RYn0) (RYn1)(RYn2)OFF b01(1 ) (A25) ON 3000r/min (2) (RYn1)(RYn2)OFF ON(RYn0) 5 5 5 5.2.2 , 4.11 (a) ON(RYn0)OFF (B) (C) (EMG)OFF
( ) (1) (B1B2) B1 B1 DC24V DC24V U B DC24V U B DC24V VAR VAR B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 13.1.2 13 2 13.
Positioning completed n.09 Speed feedforward 1 V/1000 min-1 n.0A Torque feedforward 1 V/100% rated torque n.0B Active gain *1 1st gain: 1 V 2nd gain: 2 V Gain type indicated by output voltage. n.0C Completion of position reference Completed: 5 V Not completed: 0 V Completion indicated by output voltage. n.0D External encoder speed 1 V/1000 min-1 Value at motor shaft *1.Refer to 5.8.1 Switching
Replace the DRIVER. a) For 100 VAC DRIVERs: The AC power supply voltage is 60 V or less. b) For 200-VAC DRIVERs: The AC power supply voltage is 140 V or less. Set the power supply voltage within the specified range. Measure the power supply voltage. c) For 400-VAC DRIVERs: The AC power supply voltage is 280 V or less.
12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Yes 24 V 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) IC circuit With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit 3-wire (NPN equivalent) A76H 5 V Yes Grommet A72H A73H A80H A72 A73 A80 A73C A80C 200 V 100 V 100 V or less 12 V
Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00
mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V +0.00 to +10.19 V +0.05 to +10.24 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V +0.00 to +5.09 V +0.03 to +5.12 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.09 V +0.78 to +5.12 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA +0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to
220 V 240 V 48 V 230 V 24 V 12 V T -With conduit terminal TS -With conduit terminal and surge voltage suppressor TL -With conduit terminal and light TZ -With conduit terminal, surge voltage suppressor and light DIN type is available with class B insulation only.
, 12 V 12 V IC circuit Terminal conduit M9NW 3-wire (NPN) Relay PLC Yes G59W 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit M9PW 3-wire (PNP) G5PW 24 V M9BW 2-wire 12 V K59W Grommet M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Water resistant (2-color indicator) 12 V 2-wire G5BA G59F F59F 4-wire (NPN) 5 V, 12 V IC circuit IC circuit Diagnostic output (2
IC circuit Table 1 Manufacturability Check List by Mounting Type and Port Position Yes 100 V 100 V or less No Yes No Yes IC circuit Mounting bracket B LA CB TA FY FZ Grommet 12 V Relay PLC Port position 2-wire 100 V, 200 V 24 V A64 200 V or less Nil A B C D E A59W Diagnostic output (2-color indicator) Water resistant type auto switches can be mounted on the above models, but in such case
Example) AR30-03BG-NR-A-X2068 AF-A AF-A Nq Body size 20 25 30 40 Symbol Description AR -A -B AL-A Nw Pipe thread type Nil Rc V V V V N NPT V V V V F G V V V V + AW -A -B AW 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + AG Ne Port size E AV a Mounting Nil Without mounting option V V V V B Note 2) With bracket V V V V H With set nut (for panel mount) Note 3) V V V V + Option Note
A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5
G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC
G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC
6 V Grommet Double 5 V Single 3 V P.43 10-SY320 0.65 Body ported Base mounted Body ported Base mounted 10-SY520 2.4 10-SY720 3.3 10-SY920 8.6 P.58 10-SY340 1.1 10-SY540 2.8 10-SY740 A B 4.5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors PE 10-SY940 10 Valve option P, EA, EB port size Manual override A, B port size Oil resistant
v 01 02 03 Configuration v v 2 position single (B) 2 (A) 4 1 Manual override 5 (R1) 1 (P) 3 (R2) Non-locking push style (Flush) : B: Locking style (Slotted) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2) 3 position closed center (B) 2 (A) 4 3 5 (R1) 1 (P) 3 (R2) Electrical entry 3 position exhaust center (A) 4 (B) 2 G: Grommet (DC specification
wire 12 V F5BA1 F59F 4-wire (NPN) IC circuit IC circuit IC circuit 5 V, 12 V Diagnostic output (2-color indicator) A96 A93 A90 100 V 100 V or less 100 V, 200 V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W
A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .