Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

W A MY D With shock absorber (mm) CY Model MXPJ6 MXP10 MXP6 MXP12 MXP16 C side parallelism to A side 0.02 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Parallelism D side parallelism to B side 0.02 CX C side parallelism to A side Traveling parallelism 0.004 D

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note 2) Based on JIS C 4003 Option Foot bracket (With screw) (1) Part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CP95

80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

RB/RBL/RBQ

RB(C)0805 RB(C)0806 RB(C)1006 RB(C)1007 RB(C)1411 RB(C)1412 Model RB(C)2015 RB(C)2725 O.D. thread (mm) M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 Thread prepared bore (mm) 9.1 + 0.1 0 18.7 + 0.1 0 7.1 + 0.1 0 12.7 + 0.1 0 25.7 + 0.1 0 Tightening torque (Nm) 1.67 3.14 10.8 23.5 62.8 Operating Environment 2.

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H212PC-500-F LG1H212PC-600-F LG1H212PC-700-F LG1H212PC-800-F LG1H212PC-900-F LG1H212PC-1000-F 360 460 560 660 760 860 380 480 580 680 780 880 500 600 700 800 900 1000 100 8-6.2 B 95 95 95 A 95 110 20 Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time

MXW

Mep Mep = 1/3 We x 9.8 (L3 + C) Examine Mep.

Title not found

(m) kilogram (Kg) 1 Kg = 2.2 lbs Volume* gallon (US gallon) liter (l) 1 US Gal = 3.71 l Temperature degrees Fahrenheit (F) degrees Celsius (C) C = 5/9 (F-32) Torque pounds (f) inches (lbs (f) in.) Newton-meters (Nm) 1 Nm = 8.88 lb(f)-in.

Title not found

(m) kilogram (Kg) 1 Kg = 2.2 lbs Volume* gallon (US gallon) liter (l) 1 US Gal = 3.71 l Temperature degrees Fahrenheit (F) degrees Celsius (C) C = 5/9 (F-32) Torque pounds (f) inches (lbs (f) in.) Newton-meters (Nm) 1 Nm = 8.88 lb(f)-in.

RQ

Double clevis: Clevis pins, type C snap ring for axis, and Body mounting bolts.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

Round Type Low Pressure Hydraulic Cylinder Series CH
M

21 M33 x 2 1/4 22.5 108 20 182 204.5 21 51 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Accessories (Standard) Rod end nut Mounting nut 30 30 d d C D D C H B Material: Carbon steel Material: Carbon steel B H Part no. d H B C D Applicable bore size (mm) Part no. d H B C D Applicable bore size (mm) SO-02 SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 20 25 32 40 M22

3 Port Solenoid Valve Series VQ100 1

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

ZPT/ZPX

C ZH A A B D B D ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14 M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10

70pvpump

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.7 25 25 25 1 l/min(ANR) Inlet air temperature (C) VX3 Inlet air saturation temperature (C) Ambient temperature (C) VXA Dew point indicator purge air flow rate Port size (Nominal size B) 1/4, 3/8 1/8, 1/4 VN Weight (kg) (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90)

Dedicated Controller

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation.

RZQ

Local Area: (800) 258-9200-www.stevenengineering.com Graph 1 , Circuit C , Minimum load weight = Graph 2 Selection graph Circuit B The optimum size is determined from the intersection of the operating pressure and load weight.