SMC Corporation of America
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Particularly when using a resistor in parallel with a switching element and using a C-R element to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off.

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

THERMO CHILLER HRS050-A-20-R Model Number POWER SUPPLY SERIAL No. XQ001(MAR.2019) Serial Number (SERIAL No.)

VX Variations VNl ValveO OElectrical entry VQ OGrommet OConduit ODIN connector OConduit Terminal A Energized open (N.C.) R P A Energized closed (N.O.) R P A Common (C.O.)

W/o auto switch With auto switch A 62.2 72.2 75 85 88 98 W/o auto switch With auto switch A 53 63 64.5 74.5 76 86 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore (mm) L1 L LX LT LS LH LG LD L L1 B 36 46 43.5 53.5 53 63 A B A 33.5 8 72.2 46 63 18 95 3.2 20 46 5 11 43.5 63 63 43.5 10 85

Direction P, R port A, B port specifications C8 (One-touch fitting for 8) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

2 (A) Port 3 (R) 2 (A) Flow rate (l/min (ANR)) Reduced pressure supply Port 1 (P) Pressure Characteristics Needle Characteristics Port 2 (A) 1 (P) Shows the outlet pressure (port 3 (R)) change against the inlet pressure (port 2 (A)) change.

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

Model L D 29.4 0.08 0.28 CX2N10 CX215 CX225 MS4-10 10 4 58.8 0.02 0.08 MS5-10 10 5 MS6-15 15 6 Left Right When center loading is added to the center of the plate Manufactured by Misumi Trading Ltd. Operating direction of the housing Deflection width Pressure port A B C D E F Operating direction Right Left Left Right Left Right There are 9 possible reciprocating piping methods.

Model L D 29.4 0.08 0.28 CX2N10 CX215 CX225 MS4-10 10 4 58.8 0.02 0.08 MS5-10 10 5 MS6-15 15 6 Left Right When center loading is added to the center of the plate Manufactured by Misumi Trading Ltd. Operating direction of the housing Deflection width Pressure port A B C D E F Operating direction Right Left Left Right Left Right There are 9 possible reciprocating piping methods.

For AC30-A For AC30A-A For AC30B-A For AC30C-A For AC30D-A For AC40-A For AC40A-A For AC40B-A For AC40C-A For AC40D-A For AC40-06-A For AC40A-06-A For AC40B-06-A For AC40C-06-A For AC40D-06-A For AC20-A For AC20A-A For AC20B-A For AC20C-A For AC20D-A For AC25-A For AC25B-A For AC25C-A Section Option Model Type G46-10-01 G46-4-01 G46-10-01-L G46-4-01-L Y300-A Y300T-A AKM3000-(01)-A 02-A

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

R/W AoUt (Setting of analogue output) U8 0 Y 0: 1 to 5 V 10 to 10 V Setting of analogue output (Voltage output type only) 1 R/W FrEE (Setting of free range mode) U8 0 Y 0: oFF (Unused) 1: on (Used) Setting of free range mode 2110 0x083E Setting range 0x0190 to 0x1068 (400 to 4200) 2 R/W F_H (Set value of free range) S16 4000 Y Set value of free range Rated value 10% to 105% SAVE (Accumulated

6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !

Construction Basic type N.C. type PB PB Double acting type N.O. type q q q PA PA A B A B A B A B B A e w e e With indicator With bypass With flow rate adjustment t r PA PA r A B A B A B A B Description No.