Table of Contents

03 04 q Description No.

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

CJ5-S

GA GB H H1 I J K KA M MM NA P S ZZ MQQ M 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

1

or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less XA2 XA17 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 J: 5 mm or more, I :11 mm or less J: 5 mm or more, I: 11 mm or less H : M10 or more, X:

C85

J 0.04 J 0.09 J 0.27J 0.4 J Allowable kinetic energy Air cushion/Double rod CS1 Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J C76 Non-rotating accuracy 1 30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 Single Double Closed center Exhaust center 0.60 0.60 0.56 0.60 0.43 0.43 0.15 0.20 0.15 0.15 0.13 0.15 0.59 0.59 0.59 0.59 0.30 0.30 0.22 0.22 0.15 0.15 0.14 0.14 Body ported Base mounted (With sub-plate) 2 position Body side M5 x 0.8 3 position M5 x 0.8

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 12 12.5 5.5 12 6.3 26 Operating port 2 x M5 x 0.8 Other dimensions are the same as basic type. 804 MXQ 1322Air Slide Table Basic Dimensions: MXQ8 13222 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 2 7 3.5 I J Vacuum suction port M5 x 0.8 8 Max. 11 (Retraction end adjuster) 5.5 4 6.5 Note 1) If long bolts are used, they can touch the

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR

KR

(mm) <M5> Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 10.4 13.4 22 16 8 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 (Plug: M-5P) 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

stroke adjuster at extension end) 20 F 35 62 58 48 26 18 1 6 4 x M5 x 0.8 thread depth 7 N x M5 x 0.8 thread depth 6 (Insert) 12 6 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA x M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Lead wire length of 2000 mm 10-SY3120-5LOZ-M5 SY100-68-A-20 Lead wire length of 300 mm (standard) 10-SY3120-5LPZ-M5 Circuit Diagram with Light AC circuit DC circuit Symbol for connector assembly with cover In this case, the part number for the connector assembly with cover is not required

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6