3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

size (sub-plate) CP Without sub-plate 1/8 NPTF 01T Symbol (A) 2 N.C. 1 1 (P) 3 (R) Manual override Nil-Non-locking push type (Tool type) B-Slotted locking type (Tool type) Electrical entry G-Grommet (DC specification) L-L type plug connector with lead wire LO-L type plug terminal without connector M-M type plug connector with lead wire MO-M type plug terminal without connector Function H

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Modular Style Regulator with Built-in Pressure Gauge Series ARG

MPa MPa MPa P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Pitch) Manual override (Light/Surge voltage suppressor) 6 G, H: 27.3 G, H: 28 (For DC) 29 (For AC) (Station 1) (Station n) 10.2 No bracket is assembled prior to delivery.

3 Port Solenoid Valve Rubber Seal Series SY100

Other dimensions are same as grommet type. 4-3-8 Series SY100 Base Mounted (With sub-plate) Grommet (G), (H): SY1 4(A)-M3 1 2 G H 15.6 Manual override 9 (Light/Surge voltage suppressor) 5 V100 + 13 15.5 SY P SYJ 2-2.6 (Mounting hole) 13 3 28 (For DC) VK 34.5 (For AC) VZ VT G: 300 H: 600 (Lead wire length) G, H: 26.1 G, H: 26.8 (For DC) VP 10 VG VP 27.8 (For AC) S070 25.3 21.2 VQ 9 6 A

Fieldbus system (CC-Link compliant)

QJ61BT11N Buffer memory address Remote input (RX) RX2F RX2C RX2B RX2A RX29 RX28 RX27 RX23 RX22 RX21 RX20 E2H Reserve (H) COM D COM C COM B COM A Reserve (L) Voltage decrease Reserve (L) RX3F RX3C RX3B RX3A RX39 RX38 RX37 RX33 RX32 RX31 RX30 E3H Reserve (L) Remote READY Error state flag Reserve (L) Reserve (L): Reserved bit (0 fixing), Reserve (H): Reserved bit (1 fixing) -25No.EX-OMI0001

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0.020.2MPa 0 0 0 0 Set pressure range 1 1 1 1 0.020.4MPa 2 2 2 2 0.020.8MPa + 1 Exhaust direction 0 0 0 0 Bottom exhaust + 2 Rc Nil Nil Nil Nil Pipe thread type NPT N N N N F F F F G + 3 Port size 02 02 02 02 1/4 + 4 Nil Nil Nil Nil Without pressure gauge

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

VZ3000

: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-21 Series VZ3000 2 Position Double VZ3220 Grommet (G), (H) VZ3220-M5 G H Manual override (Non-locking) (Lead wire length) Mounting hole for manifold G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ3220-L-M5 M plug connector

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

HRX-OM-M090

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Filling of Circulating Fluid Liquid level Fig. 4-6 Filling of Circulating Fluid Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fluid level falls lower than L. 4.3 Preparation of circulating fluid HRS Series 4-4 HRX-OM-M090 Chapter 4 Starting the Product 4.

HRX-OM-W058

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Fluid level Circulating fluid fill Fig. 4-6 Filling of Circulating Fluid Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fluid level falls lower than L. 4.3 Preparation of circulating fluid HRS-R Series 4-4 HRX-OM-W058 Chapter 4 Starting the Product 4.

HRX-OM-X027

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Fluid level Circulating fluid fill Fig. 4-6 Filling of Circulating Fluid Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fluid level falls lower than L. 4.3 Preparation of circulating fluid HRS-R Series 4-4 HRX-OM-X027 Chapter 4 Starting the Product 4.

HRX-OM-R016

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Filling of Circulating Fluid Liquid level Fig. 4-6 Filling of Circulating Fluid Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fluid level falls lower than L. 4.3 Preparation of circulating fluid HRS Series 4-4 HRX-OM-R016 Chapter 4 Starting the Product 4.

HRX-OM-W038

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Filling of Circulating Fluid Liquid level Fig. 4-6 Filling of Circulating Fluid Check the drain port is closed by the valve to prevent the supplied circulating fluid from draining out. Supply the circulating fluid up to the H mark on the tank.

HRX-OM-R005

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Fig. 4-6 Filling of Circulating Fluid Check the drain port is closed by the valve to prevent the supplied circulating fluid from draining out. Supply the circulating fluid up to the H mark on the tank.

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

VXA31/32

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.