AS-R/AS-Q

Air Saving Speed Controller AS-R/AS-Q Series How to Order Port size 01 1/8 02 1/4 03 3/8 04 1/2 2 02 06 AS R 2 With pressure reduction function Knob color: White With pressure reduction function 2 02 06 AS Q 2 With rapid supply and exhaust function Knob color: Light blue Applicable tubing O.D.

Quick Exhaust Valve Series AQ

3 4 AQ5000 85 75 18 85 15-12-2

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Free flow Controlled flow Model Applicable cylinder bore size (mm) Effective area (mm2) Weight (g) Port size Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 1/4 1/4 3/8 1/4 3/8 1/2 340 5.2 250 3.8 20, 25, 32, 40 115 32, 40, 50, 63 810 12.3 810 12.3 130 40, 50, 63 80, 100 1670 25.5 1670

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 0.62744 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.54323 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 2.04714 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.3376 lb

5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,

7ND9071en

Screw 306 1 Bed of Local User Interface (LUI) 307 3 Screw 308 2 Screw 311 1 Shaft 312 2 Screw 313 2 Cam disc 314 2 Screw 315 6 Terminal block 322 1 Proximity switch (D__) 323 2 Screw 346 1 or 2 Bushing (I__) 347 2 Inductive proximity sensor (I__) 348 1 Fastening plate 349 2 Screw 350 1 Washer 351 1 Screw 355 2 Microswitch (K0_, B06) 357 2 Spring washer (K0_, B06) 358 2 Screw (K0_, B06) 44

HRX-OM-X037

Fig. 2-2 Names of the parts (This drawing shows HRL200-A-40.) 2.2.1 HRL-W-40 (Water-cooled type) Fig. 2-2 Names of the parts (This drawing shows HRL100/200-W-40.) HRL Series 2.2 Name and Function of Parts 2-3 HRX-OM-X037 Chapter 2 Name and Function of Parts Table 2.2-1 Accessory list (1) Operation Manual 2 pcs. (English 1 pc.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

KJ

3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25