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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Air Pilot Operated

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

Air Pilot Operated Series NVSA

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

S Couplers Series KK/KKH/KK13

How to Order KKH 4 S M S 02 Body size With sealant (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket/Plug designation Socket S Piping port size variation Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

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ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

Miniature Regulator

Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

Plug-in Unit

S kit can be used by connecting to gateway unit.

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ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

2-Color Display

For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Made to Order (Refer to page 422 for details.)

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Hexagon lock nut Round lock nut J Nil Lock nut option Body size AS AS 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to page 490 for details.)

High Precision Digital Pressure Switch, Series ZSE40/ISE40

(10G) in X, Y, Z directions for 2hrs. each (deenergized) 980m/s (100G) in X, Y, Z directions 3 times each (deenergized) In a temperature range of 0 to 50C, 2% F.S. or less of pressure measured at 25C Vibration resistance Impact resistance Temperature characteristics 01: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female

9.8

Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.

ZSE30A(F)/ISE30A

Output voltage (Rated pressure range) Linearity Output impedance Note 2) Voltage output 1% F .S. Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

ARJ1020F

ARJF310F-01 y e !

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KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Installation height of sensor: 10 mm 3 Electrostatic potential [kV] 20 With sensor Ionizer 2 Without sensor Without sensor Discharge time [s] 15 1 With sensor L 0 10 1 Workpiece Without sensor 5 2 With sensor 3 0 500 1000 1500 2000 Installation distance L [mm] 1 2 3 4 Time [s] Run mode after static neutralization (electrostatic potential