Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 2 Series ZQ Compact Vacuum Ejector How to Order ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01
Test operation . 21 5.1 Operation procedure . 21 5.2 JOG Mode . 22 5.3 Positioning Mode . 23 5.3.1 Positioning Mode . 24 5.3.2 Motor speed configuration . 25 5.3.3 Acceleration/deceleration time configuration . 26 5.3.4 Move distance Configuration and Operation . 27 6.
(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11
(1) 5 No.VFS4000-OMY0001
(2) 6 No.VFS4000-OMY0001
3 VF4000-9A B
Actuation: 3 (3 Postion Closed Center), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal, w/Connector), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: T (NPTF)
Actuation: 3 (3 Postion Closed Center), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: DO (DIN Terminal, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: T (NPTF)
Actuation: 3 (3 Postion Closed Center), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: DO (DIN Terminal, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: E (Push-turn Locking Lever Type), Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate)
Actuation: 1 (2 Position Single), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal, w/Connector), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: T (NPTF)
Actuation: 1 (2 Position Single), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: T (NPTF)
Actuation: 1 (2 Position Single), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: D (DIN Terminal, w/Connector), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: N (NPT)
Actuation: 1 (2 Position Single), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: D (DIN Terminal, w/Connector), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: T (NPTF)
Actuation: 1 (2 Position Single), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: N (NPT)
Actuation: 3 (3 Postion Closed Center), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: E (Push-turn Locking Lever Type), Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate)
Actuation: 3 (3 Postion Closed Center), Piping/EXH: 23 (Body Ported), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate, Piping 23 w/o Sub-plate), Thread: T (NPTF)
(mm) Maximum suction flow rate (l/min (ANR)) 18 24 36 40 20 26 36 Air consumption (l/min (ANR)) Model 0.5 12 23 46 95 16 32 70 ZM07H 0.5 MPa 0.7 1.0 1.3 0.7 1.0 1.3 ZM10H ZM13H ZM07M ZM10M ZM13M 0.35 MPa Adaptable for a manifold application All tubing, wiring, indicators, and adjustment functions have been eliminated from the side surface, thus enabling assembly and maintenance while linked
Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port. Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no.
Note 2) Including a 0.3 m connector for the supply and release valves and a 0.6 m connector for the switch. 23 14 46 Maximum vacuum pressure 80 kPa Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) Switch + 8 stations with suction filter 109 g x 8 + 122 g = 994 g Supply pressure range 0.3 MPa to 0.6
OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14
Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214
Single Stage Regulator for General Applications Low to intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections