Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

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S 1 pc. n n pcs.

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[ Kit Requires for S kit SOO'.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Air Pilot Operated

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

Air Pilot Operated Series NVSA

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

S Couplers Series KK/KKH/KK13

How to Order KKH 4 S M S 02 Body size With sealant (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket/Plug designation Socket S Piping port size variation Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

45

ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

Miniature Regulator

Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

Plug-in Unit

S kit can be used by connecting to gateway unit.

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ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

2-Color Display

For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Made to Order (Refer to page 422 for details.)

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Hexagon lock nut Round lock nut J Nil Lock nut option Body size AS AS 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to page 490 for details.)

High Precision Digital Pressure Switch, Series ZSE40/ISE40

(10G) in X, Y, Z directions for 2hrs. each (deenergized) 980m/s (100G) in X, Y, Z directions 3 times each (deenergized) In a temperature range of 0 to 50C, 2% F.S. or less of pressure measured at 25C Vibration resistance Impact resistance Temperature characteristics 01: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female

9.8

Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.