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Model Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 0 1 2 3 VX021N-12A VXE22 0 2 3 4 VXE23 0 2 3 4 VX022N-12A VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Dimensions P. 17 (Single unit) 8 Series VXE21/22/23 For Oil /Manifold Fluid and Ambient Temperature Solenoid Valve for Manifold/Valve Specifications N.C.

Air Slide Table Series MXQ

"33 5 5 ! 5 Nil L -!* 3 3 #) Applicable bore size ' ;< /" 6 :)3) #<= ' ;< ;< :)3) ,-!* 3 3 ' 7> -!* 3 3 :)3) #<= ' ? @ . ? 5 ! 5 @ . 2 ) 5 !))5 5 ! 5 ,!

KJ

8 5 16 18.5 6 1 2 1 2 3 8 21 7 Tube Cap: KQ2C Applicable tubing O.D.

LEC-OM034xx

Q_Address bit 7 6 5 4 3 2 1 0 1 ID5 ID4 ID3 ID2 ID1 2 (6) Return of the final station number Indicates the range of the ID of the controller (LEC) to communication when the initial is processed. ID number is set in binary digit. Input range is from 1 to 5. If the set value is lower than 0 or larger than 5, 5 is set. ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 45 - 13.

Mini Free Mount Cylinder

Note 3) Adjust the mounting position after confirming the auto switch operation. 2 3 5 1 1 2 3.5 3 5 1 1 2 4 5 7 7 6.5 6 5.5 5 7 7 6.5 6 Auto Switch Mounting Operating Range Watchmakers screwdriver (mm) Auto switch model Applicable bore size 6 2 2 3 8 2.5 2.5 3.5 10 12 16 20 2.5 2.5 3.5 D-F8 3 2 4 4 3 4 4 3 5 D-M9 D-M9W Auto switch mounting screw This is a guideline including hysteresis,

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

KQ2

FEP, PFA, Nylon, Soft nylon (1), Polyurethane ", ", ", ", ", ", " 1 8 1 4 1 2 3 8 5 32 3 16 5 16 Note 1) Soft nylon tubing is not compatible with water.

Digital Flow Switch ( compatible)

[F30] Accumulated flow value hold setting is completed. : Data memorization is performed every 2 or 5 minutes (depending upon the setting chosen), this means that the accumulated flow value for up to 2 or 5 minutes before the power supply is turned off will not be added to the device memory.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

IDX-OM-M051

and function of parts . 1 4 Chapter 2 Transportation and installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Environment . 2 2 2 2 2 Fixing of product . 2 3 2 2 3 Pneumatic piping . 2 4 2 2 4 How to connect the facility water piping . 2 4 2 2 5 Draining piping . 2 5 2 2 6 Draining piping for condensed water . 2 6 2 2 7 Electric wiring . 2 7 2 3 Prevention of the facility water

VZS

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

Vacuum Unit Ejector / Vacuum Pump System

purity class is 2:6:3 of ISO8573-1:2010.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

3 4 5 NPN 2 outputs + 1-5 V output NPN 2 outputs + 4-20 mA output NPN 2 outputs + Auto-shift input PNP 2 outputs + 1-5 V output PNP 2 outputs + 4-20 mA output PNP 2 outputs + Auto-shift input IS Sensor connector (e-con connector) C ISG ZSM Unit specifications Note) At the factory, the connector is not attached to the cable, but packed together with it for shipment.

Rotary Table/

5 !4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Refrigerated Air Dryers

(When symbol 5 is specified.) Terminal block for power supply Drain tube Terminal block for signal 127 479 Y-shaped strainer 1/2 (Accessory) 712 2 20 735 Drain tube (O.D. 10, Length approx. 2 m) (Can also be connected on the other side.) 40 752 700 1 107 Facility water inlet R1/2 64 75 Facility water inlet R1/2 (When symbol 4 is specified.)