70pvpump

(A) 2 N.O.

ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

3 Port Air Operated Valve Series SYJA300 1

2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212 7 260

MK

1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2 ML2B C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

3-R1.5 2-4.5 through ( A , B , C ) 15.5 45 9 2 36 3 42h9 0 0.062 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ported: MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 11-5-10 10 Series MSUA Rotary Table

RLQ

MLGP HS HS HS RLQ 32 B A B A B A 26.5 29 27 MLU 32 40 7.5 47.5 8.5 48.5 4.5 44.5 30 32.5 30.5 40 50 10 54 11 55 7 51 36 38.5 36.5 ML1C 50 63 15.5 58 16.5 59 12.5 55 39.5 42 40 63 18.5 63.5 19.5 64.5 15.5 60.5 D-X 20Data 9-12-21 Proper Auto Switch Mounting Position (Detection at stroke end) and lts Mounting Height D-A7 D-A80 D-A73C D-A80C D-J79C Approx.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

As a guide, tighten it by hand, then turn it two or three turns with a wrench. Check the dimensions of each product for the hexagon width across flats.

Plate Cylinder with Lock Series MLU

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

AN

ANm0m0-KMmm 5.2-4 40dB(A): High Noise Reduction Silencer Series ANA1 A high noice reduction style silencer keeps the noise level inside a plant below 85dB(A).

Digital Flow Switches, Series PF2A, Series PF2W

SMC FLOW SWITCH Blue 5 1 12 to 24VDC Series PF2W5 35.8 A 40 UNIT RESET PF2W30-A SET Panel fitting dimension 8-M3 3 x 7.2 (= 21.6) 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

CG5-S

(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting position (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) HS HS HS 32 26.5 29 27 B A B A B A 32 40 7.5 47.5 8.5 48.5 4.5 44.5 30 32.5 30.5 40 50 10 54 11 55 7 51 36 38.5 36.5 50 63 15.5 58 16.5 59 12.5 55 39.5 42 40 63 18.5 64.5 19.5 63.5 15.5 60.5 16 Series RLQ Auto

Profile Design ISO/VDMA Air Cylinder Series CP95

when a 63 air cylinder is operated at a maximum drive speed of 500mm/s.