SYJA3000

port) (Piping port) 21.5 R1 P 8.5 6 6 R2 15 1.8 (Bleed port) With filter (80 Mesh) 217 17 21 45.5 24 32 3 position closed center/exhaust center/pressure center: SYJA5 20-M5 3 position closed center/exhaust center/pressure center: SYJA5 40-01 3 4 5 3 4 5 28 2-M5 X 0.8 4.3 22-M5 X 0.8 37.5 23 (Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R

PF-OMN0009_C

[ % ] ( ) -32No.PF-OMN0009CN-F () PF3W504 PF3W520 [ M P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

70pvvna

PAX Caution Air-hydro circuit: Application example Basic circuit Skip valve function Combination of 2 or more valves of Series VNA provides a skip valve function. Connect the skip valve to the A port side of a stop valve as in the case of the speed control valve.

NARM Series

modular type that can easily be mounted in a manifold station.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Series VQZ base mount solenoid valves combine convenience with durability and performance in a more traditional mounting style. Series VQZ Body Ported Solenoid Valves combine flexibility with high performance and long life in an inline body style.

Series VQZ base mount solenoid valves combine convenience with durability and performance in a more traditional mounting style. Series VQZ Body Ported Solenoid Valves combine flexibility with high performance and long life in an inline body style.

Series VQZ base mount solenoid valves combine convenience with durability and performance in a more traditional mounting style. Series VQZ Body Ported Solenoid Valves combine flexibility with high performance and long life in an inline body style.

Series VQZ base mount solenoid valves combine convenience with durability and performance in a more traditional mounting style. Series VQZ Body Ported Solenoid Valves combine flexibility with high performance and long life in an inline body style.

PA300/500/700

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (PA port) Rc 1/8 PA VR VH 61.5 66 2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 47.5 2(A) 2(A) 13.5 Rc 3/8 (A port) Stations L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 10 359 344 9 326 311 8 293 278 7 260 245 6 227 212 5 194 179 4 161 146 3 128 113 2 95 80 : With light/surge voltage suppressor ( ): Dimensions for external pilot Individual exhaust: VV3P5-42Stations 3-03 28.5 3(R) 3(R) Rc 3/8 (G) (E) (T) (D, Y) (R port) N.C. N.O.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Residual pressure relief 3 port solenoid valve Applicable air combination Spacer Spacer with bracket Piping adapter Silencer wAC30-A Air filter + Mist separator + Regulator (AF30-A) (AFM30-A) (AR30-A) VP517 AC25-A, AC30-A Y300-A Y300T-A E300-03-A AN30-03 AN302-03 *1 Connection threads are not available for the residual pressure relief 3 port solenoid valve.

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

Soft Start-up Valve AV2000/3000/4000/5000

K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

FGD-C

FGDCA/B FGDEA/B FGDTA/B FGDFA/B (Rc) 3/81/23/4 (MPa) 1) 0.7 1.0 ( oC) 80 FGD*A:1 FGD*B:2 2) (mm ) FGD*A:6570250 FGD*B:6570500(2 :6570250) (MPa) 0.1 SCS14 SPCE SUS316 /O NBR () () 4) (kg) FGDCA/FGDEA:1.3 FGDCB/FGDEB:2.2 FGDTA/FGDFA:2.3 FGDTB/FGDFB:3.8 (L) FGD*A:1.7 FGD*B:3.4 1) 0.5MPa 2) (65500mm) 3) 4) 3. 001 -B FGD C A 03 B N 1 * -B * * A L250 B L500(L2502 ) 03 3/8 04

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. Note 3) With a low number of operating cycles, even a valve with a small Cv factor can be operated.

5 Port Solenoid Valve Series SV

A side manual override: Orange A side passage symbol: Orange A B A B B side passage symbol: Green B side manual override: Green Pull the lever forward with a screw driver, etc.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.