C76

Different sides Same side Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 15 60 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

C76

Same side Different sides Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 15 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 65 15 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 60 15 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

LVQ

T) LVA V LVH M N LVD LVQ30, LVQ50 V SMC LVQ SMC B A SMC C LQ B A U D LVN Z (Max. T) TI/ TIL PA M N PAX LVQ40, LVQ60 PB C B A D (Max.

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

Air Slide Table

Common Adjuster Options Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6(L)-Zmm(6, 7, 8, 9) v v v v v MXQ8(L)-Zmm(6, 7, 8, 9) v v v v v v MXQ12(L)-Zmm(6, 7, 8, 9) v v v v v v v MXQ16-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25-Zmm(6, 7, 8, 9) v v v v v v v v v MXQ6A, 8A, 12A 10, 20 mm stroke Auto switch is not mountable End plate Adjustment block MXQ16(A)

Vacuum Unit Ejector / Vacuum Pump System

Example) D-sub connector -24No. ZK2-OM00201 2. Internal Circuit Wiring should be connected as shown below. Connect with the power supply respectively. Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

Thermo-chiller/Rack Mount Type

Heat quantity by cooled substance (per unit time) Q Cooled substance Cooled substance mass m Cooled substance density r Cooled substance total volume V Cooled substance specific heat C Cooled substance temperature when cooling begins T0 Cooled substance temperature after t hour Tt Cooling temperature difference iT Cooling time it : Unknown [W] ([J/s]) : Water : (= r x V) [kg] : 1 [kg/dm3]

MY2

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9N D-F9NV D-F9P D-F9PV D-F9B Perpendicular D-F9BV Auto switch part no.

VEX1

Port 3 (R) 1/4 (P1) Refer to page 1983. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) Bracket mounting screw Max. O Min.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Nw5z5-ar-(X)r ' NW5Z5-.2.L_rCr (D NVZ5000 Grommet/ 1,25120-OGOO-017 l{v:25120-oHoo41T DIN connctor (D)/ NVZsl2GODOO-017 flfi 6 .e .g With Bracket : NVZ512O-OG-O|T-F 0.18(4.5)Oia I .irri , l r q I r l l+l I _.1-_ r181(3OO) ruo wiii-unerrri , r , r ' . r r l , , . ' , . r . 1 . . ; , t 1 ' . . : r 1 . : , . . ' i a i ' L type plug connector/N\Zsl2GOLOO-olT . , . : , , r r . . t , 1 . , ' .

Compact Cylinder

switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5 100 59 Minimum Stroke for Auto Switch Mounting Operating Range [mm] [mm] Number of auto switches D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA 1 5 10 15 (5) 15 (10) 2 5 15 15 (5) 15 Auto switch model Bore size 12 16 20 25 32 40 50 63 80 100 D-M9m(V) D-M9mW(V) D-M9mA(

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported V V V V V V Symbol Flow adjustment Rear ported Rear ported *1 Made to order (Produced upon receipt of order) 1 and 2 L/min type products are not available with a flow adjustment valve. *2 Made to order (Produced upon receipt of order) t Option 1 r Output specification Nil W Lead wire with

SZ3000

ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 36.7 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n-One-touch fitting 2-One-touch fitting (A,B ports) Applicable tube O.D.: 4 6 (X,PE ports) Applicable tube O.D.: 6 (L4) L3 U Side D Side Applicable connector: D-SUB Equivalent { } JIS-X

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

Title not found

Nw5z5-ar-(X)r ' NW5Z5-.2.L_rCr (D NVZ5000 Grommet/ 1,25120-OGOO-017 l{v:25120-oHoo41T DIN connctor (D)/ NVZsl2GODOO-017 6 .e .g flfi With Bracket : NVZ512O-OG-O|T-F 0.18(4.5)Oia I .irri , l r q I r l l+l I _.1-_ r181(3OO) ruo wiii-unerrri , r , r ' . r r l , , . ' , . r . 1 . . ; , t 1 ' . . : r 1 . : , . . ' i a i ' L type plug connector/N\Zsl2GOLOO-olT . , . : , , r r . . t , 1 . , ' .

Cylinder with lock

Operating Range The figure shows the mounting example for the D-M9(V)/ M9W(V)/ M9A(V)/ A9(V) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9/ M9V D-M9W/ M9WV D-M9A/ M9AV 4 4.5 4.5 4.5 5 6 D-Y59/ Y69 D-Y7P/ Y7PV D-Y7W/ Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5/ J59 D-F5W/ J59W D-F5BA/ F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/ K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5

0.4

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 16 Series VQ1000/2000 Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.