CNA

Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 Auto switch model Foot 50 63 80 100 CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NT D-F5BAL/F59F Flange CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 Single clevis CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 BT-04 BT-04 BT-06 BT-08 BT-08 Double clevis CA1-D04 CA1-D05 CA1-D06 CA1-D08 CA1-D10 When ordering foot bracket

Tie-rod Type Hydraulic Cylinder

No. 1 1 Size M4 x 0.7 x 8L BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 D-Z7, Z8 D-Y5, Y6, Y7 When D-F5BA and G5BA auto switches

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Vacuum System Peripherals:

Area: (800) 258-9200-www.stevenengineering.com 04 Both sides D side 05 5 Can accommodate up to 8 solenoids.

CLA

Auto Switch Mounting Bore size Auto switch D-S5/S6/SS9W BA-04 SA-OS D-G5D IK59/G5 DWIK59W SA-OS SA-OB BA-lO 50 40 63 80 100 D-A5/A6IA59W D-FS D/JS D/FS DW/JS9W BT-04 BT-04 ST-06 ST-OB BT-OB D-FSNTL, FSSAL, FS9F O-A3/A44/G39/K39 BD1-04M BD1 -0SM SD1-0SM SOl-0BM SD1 -l0M D-GSSAUG59F/GSNTL D-A3 DC/A44C/G39CIK39C BA3-0S0 SA3-040 BA3-063 SA3-0BO BA3-100 D-A3 DCfA.44CfG39C/K39C: come With mounting

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d D3 L3 L4 AS231F-U01-23 AS231F-U01-04 AS231F-U01-06 AS231F-U01-08 AS231F-U02-04 AS231F-U02-06 AS231F-U02-08 AS231F-U02-10 AS331F-U02-06 AS331F-U02-08 AS331F-U02-10 AS331F-U02-12 AS331F-U03-06 AS331F-U03-08 AS331F-U03-10 AS331F-U03-12 AS431F-U04-10 AS431F-U04-12 3.2 4 6 8 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 8.9 11.0 15.2 18.5 11.0

-fl Seies

qn D N coreclor.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.

5 Port Solenoid Valve SY Series

It is already built-in to the rectifier circuit. 50 60 110 VAC Hz [115 VAC Hz] 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Modular Type Air Filter Series AF

M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment. Note 4) Applicable tube O.D for auto drain connection should be 3/8" in case NPT thread port is chosen.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

Speed Controller with

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speed controller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs.