0.

Poppet 18 or less 34 or less 22 or less 14 or less 0.45 0.20 0.38 0.17 2.0 1.7 Metal seal N.C. valve 36 or less 22 or less 15 or less 0.80 0.40 0.65 0.46 2.3 3.0 Rubber seal VQZ200 52 34 or less 22 or less 14 or less 18 or less 0.39 0.21 0.38 0.18 1.7 1.8 Metal seal N.O. valve 36 or less 22 or less 15 or less 0.74 0.30 0.67 0.43 2.5 3.0 Rubber seal 34 or less 22 or less 17 or less 22 or

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Dimension L Weight (g) 21 360.5 91.2 27 435.5 110.2 20 348 88 22 373 94.4 23 385.5 97.5 24 398 100.7 25 410.5 103.9 26 423 107 28 448 113.3 29 460.5 116.5 No.

Sine Rodless Cylinder Series REA/REB

Note 2) 15 has internal magnets in the body. 946 Sine Rodless Cylinder Direct Mount Type Series REAR Construction: 20 to 40 8 9 4 5 7 6 3 1 25 23 21 22 11 12 13 18 14 20 30 26 15 19 10 24 2 27 28 29 17 16 Component Parts Component Parts No. Description Material Note No.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

ZP

15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

CNG

11 5.5 25 16 43.4 M8 x 1.25 1/8 141 8 42 3 12 21.5 2.5 10 3.2 28 M5 x 0.8 39.8 5.5 8 29 73 33 16 13 5.5 30 20 48 M10 x 1.25 1/8 151 10 42 3 12 26.5 2.5 10 4.5 28 M5 x 0.8 49.4 5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18 6.6 40 30 71.4 M14 x 1.5 1/8 169 (178) 14 56 4 12 28 (mm) Without rod boot With rod boot Bore

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZR Double Power Cylinder/ Without Non-rotating Mechanism Double Clevis Bracket DX B Z + Stroke DB DD 4 x DT B DS DH 4 x DR DA DU DU DL DC DE DO DO Bore size (mm) 22 22 30 30 45 45 60 DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6 9 9 11 11 13.5 9 9

MXS

22 22 22 20 26 32 40 30 KA N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 M 92 92 92 102 115 156 197 255 295 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 90.5 SMXS25A, #5(#1+#5) SMXS25A, #6(#2+#6) SMXS25A, #7

VHK

21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 1 2

High Power Cylinder Series RHC

26 22.5 16.5 21.5 18 19.5 16 19.5 23.5 20 14 19 15.5 17 13.5 27 31 27.5 21.5 26.5 23 24.5 21 17.5 21.5 18 12 17 13.5 15 11.5 27.5 31.5 28 22 27 23.5 25 21.5 17.5 21.5 18 12 17 13.5 15 11.5 27.5 31.5 28 22 27 23.5 25 21.5 13.5 15 16.5 13 27.5 29 30.5 27 15.5 17 18.5 15 29.5 31 32.5 29 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

C76

d7 19 22 Thread d3 M10 x 1.5 M12 x 1.75 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 Floating joint/Series JA JA25/40 (mm) M Max. operating tension and compression power kgf (kwN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9

C76

d7 19 22 Thread d3 M10 x 1.5 M12 x 1.75 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 Floating joint/Series JA JA25/40 (mm) M Max. operating tension and compression power kgf (kwN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9

MY1

26 32 160 50 25 4.5 191 11.5 36 11 14.5 5 10.5 12 10.5 MY1B20 33.5 45 50 5 8 12.5 24 32.5 40 200 Y 2-d R S XX D Bottom ported (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y S d D R Applicable O-ring Model 22 6.5 4 4 8.4 1.1 MY1B16 24 8 6 4 8.4 1.1 MY1B20 C6 (Machine the mounting side to the dimensions below.) 8-11-22 22 Series MY1B Mechanically Jointed Rodless Cylinder

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Hygienic Design Cylinder Series HY

Installation bolt 18.5 20.5 5.5 6.6 22 26 32.2 39.2 M5 x 0.8 x 10L M6 x 1.0 x 10L 5.5 6.6 22 26 32.2 39.2 M5 x 0.8 x 10L M6 x 1.0 x 10L Note) One mounting bracket is attached with two mounting bolts. Note) One mounting bracket is attached with two mounting bolts.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140

Electric Actuator

L 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 Trademark DeviceNet is a trademark of ODVA.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 55 62 ZZ Z 16 34 16 34 G H (NN 1) x H B A 6.6 11 12 12 6H9 depth 6 +0.030 0 38 2 7 B A NN x M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) F 50 50 50 60 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

S Couplers

14 14 19 22 18 22 37 52 18 22 37 52 34.0 38.0 39.0 43.0 34.0 38.0 39.0 43.0 6.0 8.0 8.0 8.0 6.0 8.0 8.0 8.0 11.1 13.1 13.6 16.1 10.1 11.6 12.6 14.1 51.1 53.9 53.3 55.9 49.4 51.5 51.7 52.3 R1/8 R1/4 R3/8 R1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 40.0 40.8 39.7 39.8 39.3 39.9 39.1 38.2 22 22 22 22 22 22 22 22 73 74 82 83 73 74 82 83 44.0 46.8 46.2 47.8 44.3 47.4 46.6 48.2 6.0 8.5 8.5 14.0 6.0 8.5 8.5