Compact Cylinder/Guide Rod Type Series CQM

Note) 2 x 2 x RA L M Flat washer 4 pcs W B + Stroke EB A + Stroke EA 20, 25 (mm) Without auto switch A With auto switch HA Stroke range (mm) Bore size (mm) EA EB F OA HB IA IB A B B 12 16 20 25 +0.2 0 3 26.5 17 31.5 22 25 24 5 M3 x 0.5 M4 x 0.7 32 31.5 5 to 30 +0.2 0 3 5 to 30 26.5 17 31.5 22 29 28 5 M3 x 0.5 M4 x 0.7 38 37 +0.2 0 5 to 50 4 32 19.5 42 29.5 36 34 5.5 M4 x 0.7 M6 x 1.0 47

Fieldbus System

R R 8 11.5 76.5 12 3 3 X 49.5 B B B B B B B B P X P12 30 25 1 A 1 A A A A A A A 13.5 10 (12) (7.5) 25 C10: 10 One-touch fitting C10 [1(P) SUP port] P = 16 45 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting L2 = L1 10.5 L3 = 16 x n1 + 73.8 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 57 L7 = 47 x n2 + 85.8 C10 [1(P) SUP port]

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

14.5 15.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 15 40.5 20.5 Auto switch A B A B A B A B C D MXP10 MXP6 Watchmakers screwdriver MXP12 (Grip diameter 5 to 6 mm) MXP16 Other than the models listed in How to Order, the following auto switches are applicable.

Pin Cylinders Series CJP2/CJP

Material: Iron d H B C Part no.

HRX-OM-W032

the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When only the "set circulating fluid temperature" needs to be the same as the circulating temperature supplied to the user's equipment: Use "MODE 1" of the

High Vacuum Angle Valve, XL Series

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

I/O Configurator (NFC version)

(relates to position of the unit within the manifold). : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) Unit No. for IO mapping position. -49No.EX-OMV0017-B (b).

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center axis (B) Number of teetha 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

CLS

For details, refer to page 9-15-40. 9-9-21 22 Series CLS Proper Auto Switch Mounting Position of Cylinder Section (Detection at stroke end) and Its Mounting Height D-F5/J5, D-F5NTL D-F5W/J59W D-F5BAL/F59F D-A3 D-G39/K39 G (PF) 1/2 (Applicable cable O.D. 6.8 to 9.6) (33) 30 Auto switch A A B 49 Ht Ht 34 56 Hs Hs B 30 (33) 36 Auto switch ( ): Denotes

ITV

Description Applicable model ITV10 P398010-600 Flat bracket assembly (including mounting screws) ITV30 ITV20, 30 P398020-600 ITV10 P398010-601 L-bracket assembly (including mounting screws) ITV20, 30 P398020-601 [Cable connector] 243 Part No.

CLA

Operation , A B ~ Sol.

48

to 200 30 to 300 30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType

VZS

B 8375 (One time per 30 days).

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Width across flats 13 Width across flats 16 Width across flats 19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 100 20 30 10 10 75 50 10 20 20 40 40 75 75 30 30 50 50 100 100 40 Model CXS20-R CXS25-R CXS32-R 22 27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM spec. Positive COM spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec.

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.