Manifold Specifications

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

Ionizer

Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.

48

83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x

Air Cylinder Series CS1

BT-12 BT-12 BT-16 BT-18A BT-20 10 10 10 10 10 CJP 17 17 17 17 17 CJ2 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 7.5 13 12 7 8 CM2 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL CG1 D-F5/J5/F5W D-J59W/F5BAL D-F5NTL/F59F BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 5 5 5.5 6 6 MB D-G39/K39 [Stainless Steel Mounting Screw Kit] 11 11 10 10

A

/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S I O N S ANA1-10~20 ANB1-06~14 ANA1-01~06 ANB1-01~04 D I M E N S I O N S MODEL

Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33

HRX-OM-T002

Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-14 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No. Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No.

HRX-OM-R026

Blue (DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black (Output1) Fig. 3-14 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (DC 24V) Brown (DC 24V) 14 Terminal No. Blue (DC COM) 6 Terminal No. Flow switch 13 Terminal No. 3 Terminal No. Black (Output1) Black (Output1) 11 Terminal No.

100

1 Output Nil None B Adapter assembly for bottom mounting*11 (Included) Nil None A NPN open collector B PNP open collector GN With vacuum pressure detection (G) port (Rc1/8, G1/8, NPT1/8)*6 *11 This adapter assembly is for adjusting the product to the 27 mm pitch of the bottom mounting thread of the existing ZL212 series model.

3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

Pin Clamp Cylinders

20.0 Diamond type 096 9.6 097 9.7 098 9.8 099 9.9 100 10.0 10 10 14 14 20 20 Round type 105 10.5 106 10.6 107 10.7 108 10.8 109 10.9 110 11.0 145 14.5 146 14.6 147 14.7 148 14.8 149 14.9 150 15.0 Diamond type 11 11 15 15 538 Pin Clamp Cylinder Plate Cylinder Type Magnetic Field Resistant Auto Switch/Small Auto Switch Mounting C(L)KU32 Series Dimensions CKU32 (Clamping height LOW type) *

AS-FG/ASD-FG

ASD230FG ASD330FG ASD430FG 100 200 400 1.5 3 6 07, 08, 09, 10, 11 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm Effective area mm Effective area mm 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle revolutions Number of needle revolutions Number of needle revolutions ASD530FG ASD630FG 1500 1000 14 20 12 Flow rate l/min

LEH_C

200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN1 DC24V 2) USB (A-miniB type ( <> AWG20 (0.5mm 2) (, USB ) LEC-W2 1 2UL ,UL1310 Class2 (3m LEC-T1-3JG* (LEC ) 6.

LEC-OM02704CN

39.0 23.8 5.2 B 12.7 A B C D E F 10126-3000PE 10326-52A0-008 25.8 37.2 14.0 10.0 12.0 31.3 AWG2430 11 4 11 (2) SCR(3M()) 36210-0100PL 36310-3200-008 39.5 34.8 22.4 11.0 11 5 12 12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

DOC1001322

Displays the run and stop status of the product. (4) Operating condition display P.5-11 (5) Compressor operating condition display Displays the run and stop status of the compressor. P.5-11 (6) Pump Operating condition display Displays the run and stop status of the pump.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Compact Manifold Regulator

0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200