Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150

HRX-OM-R016

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit Pressure unit can be changed.

LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 1.1 0.6 0.6 0.2 0.2 0.1 0.1 200 200 0.6 0.7 0.4 0.5 0.2 0.2 0.1 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

High performance type Step Motor Controller (Servo/24 VDC)

Operation instruction 49 (1) Power on Return to origin 49 (2) Positioning operation 49 (3) Pushing operation 50 (4) HOLD 51 (5) Reset 51 (6) Stop 52 (7) Area output 53 11. Alarm Detection 54 11.1 Parallel output for the alarm group 54 11.2 Alarm details 55 12. Wiring of cables/Common precautions 62 13.

HRX-OM-M005

CH2 TEMP SP 4 3 6 3 2 1 Figure 5-11 Ten-key Screen Table 5-8 Ten-key Screen No.

Servo Motor Controller (24 VDC)

(11)BUSY is turned OFF. (The actuator stops.) INP is turned ON. 43 - 11. Option 11.1 Actuator cable LE CA Cable length (L) signal Tarminal no. Cable color Tarminal no. 1 1.5m U 1 Red 1 V 2 White 2 3 3m W 3 Black 3 5 5m Shield signal Tarminal no.

HRX-OM-W038

HRS040--20-T/MT Note1) Applicable model Rated flow50/60HzNote 2) 3) 23(0.18MPa)/28(0.23MPa) Maximum flow rate (50/60 Hz) L/min 30/35 Pump Maximum pump head (50/60 Hz) m 50 Output W 550 Recommended earth leakage breaker capacity A 20 Cooling capacity Note 4) W The cooling capacity reduces about 300 W from the value in the catalog.

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

CEx-OMQ0011

. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

LEYx-OMZ0015

50 stroke Over 50 stroke 100 stroke or less 37 38 Over 100 stroke 39 No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

Electric Actuator

0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load [kg]

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

HRX-OM-Z002

/60Hz(note2) kW 1.3/1.6 Heating capacity(Total of ch1 and 2) 50/60Hz(note3) CH10.1CH20.5 Temperature stability(note4) Circulating fluid system Rated flow 50/60Hz(note5) L/min CH121/26CH22/2 Pump capacity Maximum flow rate 50/60Hz L/min 29/38 Maximum pump head 50/60Hz m 34/50 Minimum operarating flow 50/60Hz6) L/min CH115/15CH21/1 Tank capacity(Total of ch1 and 2) Fluid outletFluid return

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Operation (example) . 49 9.1 Positioning operation . 49 9.2 Pushing operation . 50 10. Start up procedure for battery-less absolute encoder . 51 10.1 Procedure for start up . 51 10.2 When supplying power for the first time . 52 10.3 Supply of power . 53 10.4 Alarm (group E) is cleared by a cut to the power supply . 54 11.

MK

MK-50-PS 63 MK-63-PS Kit no.

Digital Flow Switch (Integrated display type)

AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -85No.PF-OMM0005-N PF3W704/720/740/711/721 (With temperature sensor) Temperature sensor Symbol A AA Model PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W704--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123

Compact Guide Cylinder

GB H J JC K L MM ML NN 50 (40 x 2) 25, 50, 100, 150, 200 63 43.5 18 15.5 4 51 20.5 12.5 148 25.5 9 25.5 37 M8 x 1.25 20 M8 x 1.25 63 (45 x 2) 67.5 48 20 15.5 4 56 24.5 13.5 162 28 11 28 40 M10 x 1.5 25 M8 x 1.25 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TF TN 50 (40 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 18 27 27 30 24 54 39 119 91 135 18.1 40 M8 x 1.25 12 7.6 63 (45

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness