3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

LX

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Escapements Series MIW/MIS

6 18 15 17.5 26 5 5 M6 x 1 M5 x 0.8 M3 x 0.5 14 26 6 2.8 25 10 7 15 12 8 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 28 14 10 20 14 12 25 25 8 40 6 14.5 2.5 M10 x 1.5 M4 x 0.7 20.4 39 Rc1/8 34 12 12 15 25 11 RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD Model 2 5.7 7 6 12.5 4 8.5 18.6

Rotary Clamp Cylinders

20 6.6 8 14 G1/4 34 76.5 10.5 Rc1/4 0.15 0.15 M8 x 1.25 112 M12 x 1.75 11 depth 8 NPT1/4 0.1 0.2 0 0.062 60 7 7.5 17 103 19 3.5 48 77 15 20 9 35 9 18 G1/4 80 35 10.5 Rc1/4 0.15 0.15 M10 x 1.5 115 M12 x 1.75 14 depth 10.5 NPT1/4 Note 1) Above figures are for the D-M9, M9W, M9A, A9.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.)

3 Port Solenoid Valve

Note) For manifold dimensions including elbow fitting, see page 11.

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

No.EX-OMX1011 PRODUCT NAME Fieldbus system EtherNet/IPTM compatible SI Unit IO-Link Master Unit MODEL / Series / Product Number EX600-SEN3-X80 EX600-ED# EX600-LAB1 EX600-LBB1 Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: W CRQ2 MSQ (mm) MSZ Q2 Y L2 max Size (mm) Q1=M Q2=M CRQ2X MSQX 10 X Q1 L1 max Size M 4 7 to 8 Y-3 Y= 10 15 9 to 14 M4 X-5 M 5 8.5 to 9 Y-3.5 L2= L1= MRQ 15 20 M5 11 to 18 X-6 M 6 10 Y-4 X= 20 30 M6 13 to 20 X-7 M 8 13 Y-5 30 40 M8 16 to 22 X-8 M10 15 Y-6 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft.

AHC System Series MA

MA210-CS1 MA210-CR1 MA210-CR2 MA210-CR3 MA210-CR4 MA210-CR5 MHR 8 10 MHK 11 40 14 MHS 15 20 MHC MHT MHY MHW -X MRHQ MA D743 Series MA2 10/15 Air Gripper: Rotary Actuated Type 10/15: MHR2-A210 10 15 10 MHR2-10-A210 10 MHR2-10-A210 15 MHR2-15-A210 Finger opening port With gasket Finger opening port With gasket Finger opening port With gasket Finger opening port With gasket For mounting tool

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 0.5 52.5 55 8 35 8 15 31 K 8 15 NA x M8 x 1.25 thread depth 8 31 KA M 40.5 6H9 ( ) depth 6 +0.030 0 3 x M8 x 1.25 thread depth 15 21.5 6.5 2 N 1 x F 55.5 4 x M6 x 1 thread depth 10 F 16.5 (Extension end adjuster) 1.5 3 38 40 37 44 22 36 74 84 Retraction end adjuster 7 6H9 ( ) depth 6 +0.030 0 20 6.5 N x M6 x 1 thread depth 11 Note 1) Note 2) Extension

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For monifold mounting) One-touch fitting (A, B port) (3.2) 32.3 (Light/surge voltage suppressor) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" + 23 20 11 2-2.6 (For mounting) 3 28.1 [35.1] 12.7 P R1 15 R2 1.4 (PE port) M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): SYJ5220-L-M5 M plug connector (M): SYJ5220-M-M5 DIN

SMC Pneumatic Clean Series

-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) M8 connector (W0): SYJ3120-W0-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) 64.3 [66.5] (2) 54.5 [56.7] (2) 63.4 56 49.5 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Note 3) Pin and snap ring are shipped together with double clevis and double knuckle joint. (40 is cotter pin.) 10-3-15 15 Series 10-, 11-CQSX, CQ2X Clean Series Low Speed Cylinder Series 10-, 11The type which is applicable for using inside the clean room graded Class 100 by making an actuators rod section a double seal construction and discharging by relief port directly to the outside of

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5

0.55

15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 tp 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) 22 to 102 (0.15 to 0.7) 15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 to 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) Single Double Single Double Single Double 20 12 23 15 20 12 30 23 15 33 30 15 50 33 18 53 45 12 48 15 45 12 55 48 15 58 55 15 75 58