C95

10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

45 115 20 41 10 39 45 70 48 24 125 17 162 M40 x 1.5 Up to 1800 1801 to 2000 226 18.5 M20 x 1.5 231 150 245 3/4 63 50 20 10 39 60 115 46 45 74 24 48 132 17 182 M45 x 1.5 Lube Non-lube Up to 1800 1801 to 2000 277 23 M24 x 1.5 301 180 298.5 71 60 25 12 49 1 67 140 86 56 29 55 60 20 160 225 M56 x 2 Up to 2000 2001 to 2400 330 23 M30 x 1.5 326 212 365 1 80 70 30 15 49 76 140 65 55 96 33 60 200

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

MXH Series Compact Slide

10 1 10 1 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 6 20 1 20 16 16 0.1 0.01 10 10 6 6 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 5 Load eccentricity 100mm Graph 8 Load eccentricity 100mm Graph 11 Load eccentricity 100mm 1 10 10 0.1 1 Weight m(kg) Weight

MXS

MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 VWith stroke adjuster MXS20-10AS MXS20-20AS MXS20-30AS MXS20-40AS MXS20-50AS MXS20-75AS MXS20-100AS SMXS20A, #1 SMXS20A, #2 SMXS20A, #3 SMXS20A, #4(#4+#9) SMXS20B, #1 SMXS20B, #2 SMXS20B, #3(#3+#7) (mm) Model F 50 50 50 60 35 60 70 70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN

5-Port Solenoid Valve

SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

NCG/CG1

on the same side) 1 2 (Different sides) Switch mounting surface Port surface Port surface Port surface Switch type D-C7/C8 D-M9/M9W D-M9A D-C73C/C80C/H7C D-B5/B6/G5/K5 D-G5W/K59W/G5BAL D-G59F/G5NTL D-B59W 50 st or more 10 st or more 15 to 49 st 50 st or more 10 st or more 15 to 49 st 60 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 65 st or more 10 st or more

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

AZ1000

30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

10

Add 10 g for conduit type, 60 g for conduit terminal type respectively.

Compact Slide Series MXH

0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (6) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (12) Load Eccentricity 200 mm 1 10 10 0.1 Mass m (kg) 1 1 Mass m (kg) Mass m (kg) 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang

Thermo-con

) Facility water flow rate: 2.6 gpm (10 L/min) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) 148 Series HEC-W Peltier-Type Chiller Thermo-con (Water-cooled) The values shown on the performance chart are not guaranteed, but typical.

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q21-08C8FU2 2-position double Metal Rubber Note) Not applicable to the S kit. 2 10-VV5Q21-08C8FU2 10-VQ2100-51 10-VQ2200-51 VVQ2000-10A-1 1 set (F kit 8-station manifold base part no.) 3 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.) 2-position double Coil voltage CE compliant 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q21-08C8FU2 2-position double Metal Rubber Note) Not applicable to the S kit. 2 10-VV5Q21-08C8FU2 10-VQ2100-51 10-VQ2200-51 VVQ2000-10A-1 1 set (F kit 8-station manifold base part no.) 3 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.) 2-position double Coil voltage CE compliant 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60

Rotary Gripper Series MRHQ

20 10 0.6 MPa 0.6MPa 8 15 Gripping force N Gripping force N 0.5MPa 0.5MPa 6 10 0.4MPa 0.35MPa 0.4MPa 0.35MPa 4 5 2 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 60 Pressure 0.7MPa 40 Pressure 0.7MPa 50 0.6MPa 0.6MPa 40 30 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 MHZ 0.25MPa 0.25MPa 0 10 20 30

Compact and Lightweight

60 15 60 60 Suction flow rate Air consumption 10 40 40 10 40 40 Suction flow rate 5 20 20 5 20 20 0 0 2 4 6 8 10 12 14 Supply pressure [MPa] 0 0 0 0 2 4 6 8 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH07SA ZH07LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics

LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s