LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

Compact Guide Cylinder

L L Plate Material Aluminum Alloy /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 3 3 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 2 2 10 50 51 100 101 200 100 101 200 10 50 51 Stroke

HRX-OM-R026

)*10 30 to 600 seconds AL20 Memory error AL21 DC line fuse cut Circulating fluid discharge temp.

Guide Cylinder/Compact Type Series MGC

A B A 20 (28) A B A B A B A B A B 16 (24) A B Hs Hs Hs Hs 24 (32) 21.5 (29.5) 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 20 24 24.5 27 27.5 29 33 30.5 29.5 23.5 26.5 28.5 25 24 (32) 20 (28) 21.5 (29.5) 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 25 26.5 27 29.5 30 29 33 30.5 29.5 23.5 26.5 28.5 25 25 (33) 21 (29) 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5

CJP

position CJ1 CJP (b) Rod side Head side CJ2 D-97, D-93A CM2 (c) CG1 MB MB1 A dimension B dimension C dimension W dimension 5, 10, 15, 20 (st) 30 (st) 3.5 Bore size (mm) 6 10 15 D 5, 10, 15, 20 (st) 30 (st) 7.5 10 11 5, 10, 15, 20 (st) 30 (st) 1.5 3 3.5 5 (st) 2.5 2 10, 15, 20 (st) 30 (st) 5 4 3.5 CA2 9.5 9 9.5 CS1 Note 1) For 5 stroke cylinders, only one auto switch may be mounted either

CJP

, 15, 20 5, 10, 15, 20, (25), 30 10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

JXCx-OMU0026

12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 24 16 8 Min. speed [mm/s] (Speed tuning control) 39 26 13 Model LEFS40 Lead symbol H A B Lead [mm] 30 20 10 Stroke

Digital Flow Switch ( compatible)

supply Power Electrical Used as IO-Link device 18 to 30 VDC 10% Current consumption 55 mA or less Protection Polarity protection Display accuracy 3%F.S.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

OMR0031

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

3

B PF3W3 F AA F AA K L K L 4 x P 4 x P N N (mm) Function Bracket dimensions Model Details Q number A AA B D F K L N P Q S T of rotations PF3W704S/504S PF3W720S/520S PF3W740S/540S 6 56.5 22 63.6 (Max. 68.6) 104 50 70.2 34 58.5 18 13.6 2.7 depth 10 19 6 60.5 22 63.6 (Max. 68.6) 112 54 74.2 34 62.5 18 13.6 2.7 depth 10 19 7 78.0 30 75.25 (Max. 81) 142 71 94.5 44 79.0 28 16.8 2.7 depth 10 28 8

Rotary Table/Vane Style Series MSU

For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 DSize Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 30 60 50 0.9 20 For 180

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

HRX-OM-X084

Fig 9-5 Cooling capacity (HRR010-A -10-) 9.4.2 HRR010-W-102000 2000 50Hz 60Hz 25 1500 1500 25 Cooling capacity[W] Cooling capacity[W] 32 32 35 35 1000 1000 500 500 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] The cooling capacity will be reduced by 300W when option: T1 is selected.

2-Color Display Digital Flow Switch Series PFM

(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725

VCL

VAC, 200 VAC, 220 VAC, 230 VAC, 240 VAC (50/60 Hz) Rated voltage 200 VAC, 220 VAC, 230 VAC, 240 VAC (50/60 Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Class B VCL20: 6 W, VCL30: 8 W, VCL40: 11.5 W Power consumption DC VCL20: 22/19 VA VCL30: 36/30 VA VCL40: 45/37 VA Note 2) Inrush VCL20: 8.5 VA VCL30: 10 VA AC 50/60 Hz Apparent power VCL20: 10/8 VA VCL30

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)