Integrated Controller

to 225 401 to 450 10 to 700 5 to 360 3 to 170 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 451 to 500 10 to 600 5 to 300 3 to 140 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750

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IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Suction Guard (Produced upon receipt of order) FHG Series

T dimension) 0 1 5 None Differential pressure indicator Differential pressure indication switch Note) 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)

AMX-OM-L023_e

Fi l t rat i on rat i ng0. 01 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et oi l m i st concent rat i on: 0. 08 ppm ( Fi l t er i nl et : 24ppm ) Fl ui d ot her t han com pressed ai r Ai r pressure m ore t han 1. 0 M Pa** and 0. 05M Pa* or l ess Fol l ow i ng envi ronm ent s l ead to cause breakage.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

acting, Single rod Action Air Fluid 1 MPa Proof pressure 10.7 MPa Maximum operating pressure 0.12 MPa 0.06 MPa Rubber bumper Minimum operating pressure CJ1 0.1 MPa Air cushion Without auto switch: 10C to 70C, With auto switch: 10C to 60C Ambient and fluid temperature CJP Rubber bumper/Air cushion Cushion Not required (Non-lube) Lubrication CJ2 +1.0 0 Stroke length tolerance CM2 50 to 750

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

Specifications Model MGC20 MGC25 MGC32 MGC40 MGC50 Base cylinder CDG1BA Auto switch Bore size Port thread type Stroke 20 25 32 40 50 Bore size (mm) Action Double acting Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.15 MPa (Horizontal with no load) 10 to 60C Ambient and fluid temperature Piston speed 50 to 750 mm/s Cushion Air cushion MGJ

ZP

Form w 1 Material 12 N S U F GN GS 10 10 11 1 ZP UT 13 13 14 1.5 16 16 17 Y 2.5 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 With adapter 10 to 16 w q ZPT UT N A5 10 e Vacuum inlet (Male thread) B Width across flats D 15.5 C A5 M5 x 0.8 A6 M6 x 1 A Model A B C D

O

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

O

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

ITV-E

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

The maximum speed of 750 mm/s can be accommodated if the piston is to be locked in the stationary state for the purpose of drop prevention. CLQ Made to Order Specifications (For details, refer to page 9-16-1.)

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

[UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply. 50 50 to to 1000 1000 * Refer to the applicable stroke table. y Motor option Nil Without option B With lock Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Type Double acting, Single rod Action Air Fluid 145 psi (1.0 MPa) Proof pressure 102 psi (0.7 MPa) Maximum operating pressure 7 psi (0.05 MPa) Minimum operating pressure Without auto switch: 14 to 158F (10 to 70C) (No freezing) With auto switch: 14 to 140F (10 to 60C) (No freezing) Ambient and fluid temperature Not required (Non-lube) Lubrication +1.4 0 mm Stroke length tolerance 50 to 750

TM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T 600 VMG 400 750 With rollers convenient for moving With slant prevention structure adjustable with numbers of reels set Tube Reel: TBR-1/2/3/4 Tube Stand: TB-2 Applicable tubing size (mm) Model 4, 6 TBR-1 8 TBR-2 10 TBR-3 12 TBR-4 15-6-35

Membrane Air Dryer

750 240 100 IDG100M2 IDG100HM2 IDG100LAM3 IDG100SAM3 1000 1000 300 150 Rated conditions are 0.7 MPa of inlet air pressure and 25oC of inlet air temperature.

IDG

IDG75HV IDG100HV 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LV IDG50LV IDG60LV IDG75LV IDG100LV 75 110 170 240 300 IDG60SV IDG75SV IDG100SV 50 100 150 Note) Standard dew point : Outlet air atmospheric pressure dew point under standard performance conditions Standard purge rate : Ratio of purge air flow rate to inlet air flow rate under standard performance

Series IDG

combined with the single style 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88)