SRP

Options Description Model Material Bracket B21-1-T1 Rolled steel plate (electroless nickel plated) Specifications M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid Proof pressure MPa 1.5 Maximum operating pressure MPa 1.0 0.005 to 0.2 Low pressure type Regulating pressure range MPa 0.01 to 0.4 High pressure type Ambient and fluid temperature (C) 0 to 60 Fluid consumption l/min (ANR)

HRX-OM-Z015

Silent interval is indicated by T1-T2-T3-T4. Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

ZSE30/ISE30

consumption Panel mount/Bracket Option Features 2 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1

HRS100/150

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 118 Cooling Capacity Calculation HRS100/150 Series Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

Thermo-chiller

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 23 Cooing Capacity Calculation Series HRS100/150 Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

JOG and constant rate movement, return to origin, test drive and testing of forced output can be performed. 569 B LEC Series Teaching Box/LEC-T1 RoHS How to Order LEC T1 3 J G Enable switch (Option) Enable switch Teaching box Nil None S Equipped with enable switch Cable length [m] 3 3 Interlock switch for jog and test function Stop switch Initial language Stop switch J Japanese E English

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

energy saving effect

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

DOC1003626

Silent interval is indicated by T1-T2-T3-T4. Table 3.8-2 RTU mode message frame Address c)Function d)Data e)Checksum a)Start b)Device (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (noncommunication time).

HRX-OM-W069

Silent interval is indicated by T1-T2-T3-T4. Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

Compact Cylinder with Lock Series CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

Compact Cylinder

YA 03 A-type mounting bracket Applicable air cylinder bore size Mounting bracket YA YB YU T2 V M W U 03 05 For 32, 40 For 50, 63 A-type mounting bracket B-type mounting bracket Joint T1 Material: Chromium molybdenum steel (Nickel plated) (mm) F B E Allowable Eccentricity (mm) Bore size (mm) 32, 40 50, 63 32 40 50 63 1 0.5 D E F M T1 T2 B Bore size Eccentricity tolerance Backlash Part no.

Speed Controller with

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002F3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002F 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052F 4.5 19.6 24.6 17 38 28 4.5 6.5 9.5 15.5 AS-30L AS3002F 24.8 29.8 22 43 33 1.4 AS-40L AS4002F 25.7 30.7 28 49 39 3.5 18.2 23.2 11 3.5 18 11.3 1.6 AS-20D AS2002F 18.6 23.6 12.6 19.6 AS-25D AS2052F 4.5 4.4 22 27 17 4.4 25.8

Series AS-FM/AS-M/ASD-FM

Dimension AS220M01 02 AS120M H (width across flats) 8 L1 T2 24.8 (Max. 29.8) M5 x 0.8 28.2 (Max. 33.2) L2 A D1 9 10.3 L3 10 M5 x 0.8 10-32UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 Model D1 D2 Min. Min. Max. Max.

asilltr

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

Air Cylinder NCM Series Stainless Steel Cylinders

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

Low Profile

Relationship Between Flow Rate and Pressure Difference (Representative values) 100 [Inrush] 90 80 70 60 50 40 30 20 10 0 0 0.05 0.1 0.15 0.2 0.25 Pressure difference [MPa] Flow rate [L/min (ANR)] Rated voltage SX090 [Holding] SX91 1 2 35% (SX090) 42% (SX9 ) of rated voltage 0 V SX92 100 10 ms T1 (ON) (2 s or more) T2 (OFF) Energized condition 1 Low Profile 2/3-Port Solenoid Valve SX90/090

Ejector Valve Unit, Series ZYY/ZYX

Nil 0.6m 30 3m 50 5m Example) ZSE1-00-15CN-X129 1pc. ZS-20-5A-50 1pc. 5 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Internal Circuits and Wiring Examples 1. Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

Angle Seat Valve /

bar absolute, T1 = 297 5K, 0.07 bar DP 0.14 bar.