Precision Regulator IR-OMT0020 PRODUCT NAME Precision Regulator MODEL / Series / Product Number IR1000-A IR1010-A IR1020-A Contents Safety Instructions 1 to 5 1. Application 6 2. Specifications 6 3. Construction and Operation Principles 7 4. How to order 8 5. Bracket, gauge and switch assembly (optional) 9 6. Panel mounting 10 7. Troubleshooting 11 8.
IR-OM09 PRODUCT NAME Precision Regulator MODEL / Series / Product Number IR2000-A IR2010-A IR2020-A Contents Safety Instructions 2 to 6 1. Application 7 2. Specifications 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8.
()ISO VG32 2 ()ISO VG32 , 6 VT317**-OMH0003-A VT317E 1. 1.VT317 904 2. 1 1 2.30 1 VT317V 1.
R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8
Spare Parts List 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 29063#1 Valve NBR 1 JIS B 2401, P3 O ring NBR 2 JIS B 2401, P7 O ring NBR 1 JIS B 2401, P10 O ring NBR 1 JIS B 2401, P34 O ring NBR 1 -9- #1 -9-10-10- Revision A Format change and content review B Drawing update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249
Bracket Pressure gauge to 1 2 1 8 / / 14-5-15 Vacuum regulator IRV1000/2000/3000 Able to adjust the pressure for vacuum line Bracket Pressure gauge 100 to 1.3 kPa 14-6-1 M5 to 2 0.01 to 0.7 0.05 to 0.7 1 8 3 0 / Precision regulator VEX13 Large capacity exhaust regulators Setting sensitivity: 0.2% F.S. Repeatability: 0.5% F.S. Bracket Foot Pressure gauge Silencer 14-4-2 2 F.R.L.
Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.
No.SY3000-OMH0002 SY V100 / -2,3 -4,5 -4,5 -6 -6 -6 -6 -7 -7 -7 -814 -15,16 -1No.SY3000*-OMH0002 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating
L m3 m3103 L ... 1: Hysteresis can be set between "0" and "3% of maximum rated flow". If the difference between Set point 1 and Set point 2 is less than "6% of maximum rated flow", the maximum Set value of hysteresis is (Set point 1 Set point 2) divided by 2. 2: When Set point 1 = Set point 2, chattering may occur.
It should be provided by the customer. 2 Joint and modular adapter are shipped together with the product. 6 EX245 Series Specic Product Precautions 1 Be sure to read this before handling the products.
5 to 60C (No freezing) Ambient and fluid temperature Fluid Air Construction Relieving type Symbol Port Size/Weight Common IN Individual IN Port size Weight (kg) IN Pressure gauge port size 1 Model Piping IN side OUT side Body Regulator End plate End plate OUT IN 2 1 2 OUT Common IN 1 4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 IN 1 OUT 2 2 OUT ARM3000 0.47
Caution (1) Perform the following maintenance regularly to avoid possible danger due to unexpected auto switch malfunction. 1) Securely tighten the auto switch mounting screws.
GV*-OMH0003-C PRODUCT NAME High Vacuum Slit Valve MODEL / Series / Product Number XGT312-50336-** XGT313-50336-** B Contents Safety Instructions 2 to 3 1. Specifications 4 2. How to order 5 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7.
Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation
pc., Input/output signal connector 1 pc., Power supply connector 1 pc., Operation manual (for installation/operation) 1, Quick manual (with a clear case) 1, Alarm code list sticker 1, Ferritic core (for communication) 1 pc.
-r I tt""d lii9;--1@_*_1aru" l . 6 l y ' | t Fiif_ilri v *r T f l l T r I L---+---J-J--fo O Series NCM Auto Switeh Mounting Position aAuto $vidr Placemer* dr|lsidrs D-85, 86 Type Front Nose Mounting type Auto switch Auta Swifuh Pkrcement Dfinensions 0.97 1.03 1 . 1 2 1.22 1.35 '( ) are for Front Nos Mounting type cylinders.
6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge
How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.
Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.