2-Color Display Digital Flow Switch Series PFM

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static. Ra Ru Rh Rd Flow (b) The gas flows from the left side. 931 Series PFM7/PFM5 Component Parts Straight piping No.

Compact Cylinder with Solenoid Valve/

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA

3 Way,3 Port Solenoid Valve NVZ Series

NW3Z5-41 C'r C) Nvz5l4-ooo NVZ5r4M-OOO .NW3Z5-41R-Or-O NVZ5l4R-OOO NW3zs4lR-ot-O Blank Plt asdt DXT201-15-1A lflhere are more than g stations, supply air and exhaust lrom both sides ol manifoldBottom Dorted irw3zs4{to2-c} Nvv3zs-4o-@6)z-orr Apdlcable valvsc NVz5l4-OoO Nvzsl4M-OOO Stalionsl [there are mor rhan 6 Blank pbte asdy DXT201-15-rA eTZ=tatio* ststions, suppry air and |.i : exhausl

3M/SMseries

(c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12 13 '14 16 17 19 19 n Lr 3.29 (83.5) 4.37 (1r1) 5.45 (38.5J 6.54 (i66) (1s05) 8.70 (2a) 9.78 (248.5) 10.87 \2761 11.95 {303.5) 13.03 (33') 14.11 (ss8,5) 15.20 (386) 16.28 (4r3.5) 17.36 (44r) 14.44 (468.5) 19.53 (496) 20.6"1 (523.5)2r.69 (551) t578.5) Ll 241 (71.3) 3.90 (ee) 4,94 u .5) 6.06 {1s4) (ra

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

IZS30_eng

Note No intermediate bracket is attached to IZS30-300B (SB), IZS30-780B (SB)). Intermediate bracket A. Tap M5 thread on the brackets mounting positions at the installation side, and fix the ionizer body and brackets with M5 threads. M5 tap M5 threads 4. Adjust angle of the ionizer body to ensure proper static charge elimination, and fix it with detent threads (M5) of brackets.

AC Servo Motor Driver (Pulse input type/Positioning type)

Driver Servo amp lifier (Note 7) (Note 7) (Note 4, 9) (Note 2) 24VDC CN1 CN1 1 DICOM 9 ALM Trouble (Note 6) RA1 13 DOCOM 10 SA Speed reached (Note 3, 5) Forced stop RA 2 EM1 SON RES 8 4 3 (Note 9, 11) Servo-on 11 RD Ready RA 3 (Note 9, 10, 12) Reset Electromagnetic brake interlock 12 MBR Speed selection 1 RA 4 SP1 5 6 Forward rotation start Reverse rotation start ST1 ST2 7 10m max. 10m max

AC Servo Motor Driver (CC-Link Type ）

4) Forced stop DOCOM DOCOM DICOM (Note 4) ALM RA Trouble Note 1.

Compact Cylinder with Lock Series CLQ

Double clevis pins and retaining rings are included. 829 33.5 Series CLQ Dimensions: 63, 80, 100 Both ends tapped style: CLQA63/80/100 RA RB 2 x 4 x O threads RA RB Basic style (Through-hole): CLQB63/80/100 P (Rc, NPT, G) Extension locking LOCK Rod side cylinder port F Q H effective thread depth C P (Rc, NPT, G) V Head side cylinder port I D M E Z T N Dust cover (Manual unlocking unit) 4

CKZ2N

Right arm) PD0.05 PB0.02 LA0.1 LB L PA0.02 PC0.05 N 2 x 2-PH7 Depth D 2 x 2 x NPT 1/4 G 2 x 2 x MM Depth J E B RD (mm) Bore (mm) B C D E GA GB GC J L LA LB MM N P 50 63 80 12 15 12 95 112 154 48 54 76 13.7 16.6 19.6 134.3 141.2 185.8 138.5 147.5 199 93 90.5 137.5 12 12 18 376.7 395.6 530.9 149.5 158.5 214 78.4 78 113.7 19 22 30 8 10 12 M8 x 1.25 M10 x 1.5 M12 x 1.75 Bore (mm) PA PB PC PD R RA

AC Servo Motor Driver (CC-Link Type ）

DOCOM DICOM (Note 4) ALM RA Trouble Note 1.

Compact Cylinder

to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 13 16 52 6.5 M8 x 1.25 26 14 7 40 5.4 46.5 39.5 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 48.5 Note 2) 40.5 Note 2) 15 20 64 7.5 M10 x 1.5 32 17 8 50 6.6 10 to 100 M8 x 1.25 11 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 15 20 77 7.5 M10 x 1.5 38.5 17 8 60 9 10 to 100 54 46 M10 x 1.5 14 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 Bore size (mm) Stroke range (mm) 32 40 50 63 RA

NVZseies

NW3Z5-41 C'r C) Nvz5l4-ooo NVZ5r4M-OOO .NW3Z5-41R-Or-O NVZ5l4R-OOO NW3zs4lR-ot-O Blank Plt asdt DXT201-15-1A lflhere are more than g stations, supply air and exhaust lrom both sides ol manifoldBottom Dorted irw3zs4{to2-c} Nvv3zs-4o-@6)z-orr Apdlcable valvsc NVz5l4-OoO Nvzsl4M-OOO Stalionsl [there are mor rhan 6 Blank pbte asdy DXT201-15-rA eTZ=tatio* ststions, suppry air and |.i : exhausl

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

AC Servo Motor Driver (Network card type ）

Driver Driver Servo amplifier Servo amplifier or MR-D01 or MR-D01 24 V DC 24 V DC DOCOM (DOCOMD) DOCOM (DOCOMD) Control output signal Control output signal RA RA For source output interface For sink output interface Use a noise filter, etc. to minimize the influence of electromagnetic interference.

Slider Type Ball Screw Drive/11-LEFS Series

(Page 47) Select the target model based on the workpiece mass and speed with reference to the . 0 0 200 400 600 800 1000 Speed: V [mm/s] Selection example) The LEFS40S4B-200 is temporarily selected based on the graph shown on the right side. (LEFS40) Step 2 Check the cycle time.

CLQ

RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Cylinder with Turntable Series MGT

c d e XAH7 XC XL X X0.02 T groove dimensions (mm) a b c d e XX section detail drawing Bore size (mm) 63 80 100 11 17.8 10 7 18.5 2 x R3 13.3 20.3 12 8 22.5 8 15.3 23.3 13.5 10 30 6+0.05 0 6 WB Z WA XX section QQ section detail drawing Notch spring force adjustment bolt 4 x OA through 4 x OB counterbore depth OL L 4 x MM depth ML 22.5 QQ section 8 x NN depth NL XX section Z WA Q 45 X0.02 RA

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R