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NOTE Tighten the waterproof cap by the specified tightening torque. (0.05 Nm for M8, 0.1 Nm for M12) -22No.EX-OME0004-F Revision history B: All revised contents C: Revision D: Limited warranty and Disclaimer are added. E: Contents are added.

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

Master PLC A 3:No Connect 3:GND B 4:RxD/TxD_P 4:No Connect 5:No Connect Item Turning ON Turning OFF RUN Power ONgreen Power OFF DIA Diagnostic errorred Normal BF Communication errorred Normal 6 - System configuration This product is connected to the field bus (PROFIBUS DP) as a slave. Master Power SUP.

Revision history A: P11 Addition note B: overall revision C: P6 Add cable color 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 11 -

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. Design Warning 1. When connecting the exhaust piping onto 3(R) port, confirm that the effective area is larger than the figure shown below. If the effective area is smaller than the figure listed below, back pressure will induce air leakage.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: T8 (400W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: T6 (100W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„

L Left side Right side Nil Adjuster Adjuster Adjuster options Retraction stroke end Shock absorber RJ Note 1, 2) None Adjuster (Rubber stopper) Shock absorber (RB) Adjuster (Metal stopper) (Short stroke type) AT A BSAT CSAT BT ASBT B CSBT CT ASCT BSCT C JT ASJT BSJT CSJT None Adjuster (Rubber stopper) Shock absorber (RB) Adjuster (Metal stopper) Nil AS BS CS Extension stroke end Table Table

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Mounting Number of auto switches B L F G C D T Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion 2 pcs. 3 pcs. 1 pc. n pcs. Nil 3 S n Auto switch Nil Without auto switch Refer to the table below for the applicable auto switch model.

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 11 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting

Model: 11 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting)

Series: 1 (JSY1000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 11